Edwards

Global Technology Centre
Innovation Drive
Burgess Hill,  RH15 9TW

United Kingdom
https://www.edwardsinnovation.com
  • Booth: C1229


Sustainability through Collaboration

Edwards is a leading manufacturer of sophisticated vacuum products and abatement systems and a leading provider of related value-added services for the manufacture of microelectronics devices, including silicon and compound semiconductors. Our innovative leading technology solutions are designed to maximize process uptime, yield and throughput, whilst striving to balance the often conflicting requirements of: lower cost of ownership through reduction in consumables usage (electrical power, fuel gas, nitrogen and cooling water); reduced environmental emissions and safety compliance (noise, vibration, sub-fab particles, waste gas and waste water); extended product lifetimes and reduction in on-going service costs.

www.edwardsinnovations.com

 Products

  • Exhaust Management Solutions
    We are the world leader in Exhaust Management Solutions. Our goals lie far beyond the destruction of toxic and global warming gases, which impact our environment....

    • Atlas™ from Edwards, provides outstanding reliability, excellent powder handling and corrosion resistance, delivering abatement performance for the semiconductor, flat panel display, solar and MOCVD industries.
    Atlas - Edwards Vacuum

    EZENITH offers an advanced portfolio of systems providing fully integrated vacuum and exhaust management solutions for all of your semiconductor processes applications.
    Integrated Solutions - Edwards Vacuum

    Edwards Proteus enables the effective treatment of PFC and other global warming gases without the use of natural gas or other hydrocarbons. 
    Proteus - Edwards Vacuum

    The Spectra exhaust management system is a cost-effective, reliable and high performance abatement solution for the latest generation of Flat Panel Display (FPD) and Solar Cell manufacturing processes.
    Spectra - Edwards Vacuum

    Neptune - A large heat capacity that abates more process gas and offers a reduction in the cost of ownership through SMART technologies.
    Neptune - Edwards Vacuum

    Edwards Smart Thermal Management Solutions - Designed to provide custom process solutions to increase system yields, Smart TMS benefits from Edwards global presence and industry experience.  
    SMART TMS - Edwards Vacuum

    Edwards Gas Reactor Column - Specifically designed to safely remove hazardous gases from vacuum pump exhausts on semiconductor processes. 

    Gas Reactor Column (GRC) - Edwards Vacuum

  • CTI-Cryogenics Cryopumps
    CTI-Cryogenics is the global leader in cryogenic high vacuum technology. CTI builds a broad array of cryopumps and cryopump systems designed to deliver exceptional performance, reliability and productivity....

    • From our single cryopumps used in a spectrum of high technology research applications to our sophisticated cryopump systems used in the manufacturing of semiconductor, flat panel, and optical devices, CTI-Cryogenics sets the world standard for cryogenic high-vacuum technology

    Key Features

    • - Fast Regen™ capability that extends cryopump performance between regenerations
    • - Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
    • - An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
    • - Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation.

    CTI-Cryogenics Cryopumps - Edwards Vacuum

  • STP Maglev Turbomolecular Pumps
    On Chamber Solutions Reliable performance with zero maintenance - that is the Edwards STP Maglev Turbomolecular Pumps range....

    • The rotor is entirely suspended by magnetic bearings - perfect for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.

    Advanced High Throughput Series

    The Advanced series offers high levels of throughput, perfect for your semiconductor etch and CVD processes:

    - Compact footprint

    - Throughput speeds from 300 l/s to 4,500 l/s

    - Throughput up to 6 slm and increased H2, N2 and Ar performances

    STP Maglev Turbomolecular Pumps - Edwards Vacuum

  • iTrap® Process Gas Analyzers
    Edwards Process Gas Analyzer - Real time process control for Semiconductor applications...

    • iTrap® is a compact, highly sensitive ion trap Fourier Transform mass spectrometer. It is an ideal tool for process analysis and inline process control. It can be used in R&D and production environments. iTrap supports you reliably in detecting the smallest traces of reaction byproducts or contamination, it helps you to investigate effectiveness of cleans and analyze chamber health. A mass spectrum is measured in almost real time, and you can trace very small amounts of molecules in your process chamber. iTrap is a powerful tool in the hands of a researcher or process development engineer and can also be used as an intelligent sensor integrated and controlled by other process tool equipment.

    Benefits

    Edwards iTrap convinces through: 

    • Speed | Real time measurements possible, full spectrum in < 0.5 sec
    • Sensitivity | Small trace concentration measurements 
    • Compactness | Can be integrated with a process chamber. Standardized software interface ready for external chemicals. 
    • Robustness against corrosives | Inert surface, No detectors. Withstands H2, Cl, F and other aggressive chemicals 

    iTrap® Process Gas Analyzers - Edwards Vacuum

  • Semiconductor Dry Pumps
    Greener and more reliable with a lower cost of ownership...

    • Our innovative range of dry pumps brings you cutting-edge technology designed to enhance your semiconductor and electronics manufacturing environment. Each range has been specifically designed to bring you advantages in environmental performance, reliability in harsh conditions and agility in light duty applications.

    iXL series for light duty applications

    iXM series – low energy use, high performance

    iXH series for harsh environments

Categories

202 Other Equipment
  • Vacuum drying & out gassing Systems
    • 203 Inspection & Measurement Products
  • Leak Detection Systems - Vacuum or Gas
    • 400 Components, Parts & Accessories
  • Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
  • Gaskets; Seals; O rings; Elastomers; Resins
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants
    • 401 Sub-systems
  • Pumps, Vacuum
    • 600 Communication Software
  • Equipment Interface; Communication Protocols
    • 700 Manufacturing Services
  • Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
    • 701 Manufacturing Services or Consulting
  • Environmental, Health & Safety

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