FRT GmbH

Friedrich Ebert Straße 75
Bergisch Gladbach,  D-51429

Germany
https://www.formfactor.com/products/metrology/
  • Booth: C1533

FormFactor FRT Metrology welcomes you!

FormFactor FRT Metrology offers a comprehensive range of fully automated, SEMI-compliant optical surface measuring systems. SurfaceSens technology has been designed to achieve superior information about the measured sample and greater insights about the products quality. The flexible sensor set-up facilitates versatile results about several surface parameters, such as topography, roughness, TTV bow and warp, flatness, coplanarity, sample and layer thickness, and many others. More than 500 reputable international companies from the semiconductor, MEMS, optics, photovoltaic and other industries equip their R&D and high-volume production with FRT Metrology systems. FRT Metrology operates from Bergisch Gladbach, Germany and is part of FormFactor since October 2019.


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