The rotor is entirely suspended by magnetic bearings - perfect for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.
Advanced High Throughput Series
The Advanced series offers high levels of throughput, perfect for your semiconductor etch and CVD processes:
- Compact footprint
- Throughput speeds from 300 l/s to 4,500 l/s
- Throughput up to 6 slm and increased H2, N2 and Ar performances
STP Maglev Turbomolecular Pumps - Edwards Vacuum