Instrumented Wafer (Thermocouples, Bonded Wafer or RTDs) finds application in semiconductor processing equipment where knowing and controlling the temperature at the surface of a wafer is critical.
CORREGE/THERMO-ELECTRIC’s instrumented Wafers are being used in many industries including applications such as Rapid Thermal Processing (RTP), Rapid Thermal Annealing (RTA), Post Exposure Bake (PEB), Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), ION Implantation, Solar Cell, and many other thermally driven processes.
CORREGE/THERMO-ELECTRIC has the expertise to design and install our thermocouples on a large range of substrates including Silicon, AlTiC, Glass, Ceramic and other supplied Bare, Coated, or Patterned substrates. Other custom substrates, shapes and sizes available.