EQ GLOBAL

56, Seochon-ro, Namsa-eup, Cheoin-gu
Yongin-si,  Gyeonggi-do  17118

Korea (South)
https://eq-global.co.kr/kor/main/main.html
  • Booth: C1460

Since its establishment in 2001, EQ Global has grown into the best semiconductor equipment repair company in Korea through continuous investment and R&D.

We provide a wide range of technical solutions to our customers through our advance into plasma sources for semiconductor equipment and their applications.

EQ Global's efforts to improve customer value do not stop in Korea.

EQ Global is supporting global customers by establishing local subsidiaries in Wuxi, China and Singapore, and is implementing a strategy to enter new markets such as Europe and the Americas.

EQ Global will do its best to become a company that provides the best solutions to customers, a company that makes all colleagues happy, and an innovative company that changes the world with the core values ​​of customer focus, technology leadership, process transparency, communication and empathy.

 Products

  • RF MATCHER
    EQ GLOBAL RF Matcher provides fast and accurate Matching Algorithm through efficient Sensor/Motor control, and provides customers with maximum efficiency of perfect Matching and Power....

    • <PRODUCT FEATURES>

    Matching Speed within 1sec
    Auto/Manual Control
    Air / Water Cooling
    User Interface for Easy Operation
    RS-232 / RS-485 / Analog Interface

    <APPLICATION>

    Descum Process
    PECVD system
    Dry Etch system
    Sputtering system
    OLED system
    Atmospheric plasma system

    <PRODUCT LINE-UP>

    Power

    400kHz

    2MHz

    3.2MHz

    12.56

    MHz

    13.56

    MHz

    27.12

    MHz

    40MHz

    1.5kW

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    2.5kW

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    3kW

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    5kW

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    10kW

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    ■ : Released ● : Product Available ▲ : Splitter Matcher ★:Developing

  • RF GENERATOR
    EQ GLOBAL RF Generator is provided according to the conditions of each process such as various power and frequency, and the highest efficiency RF Generator is provided to customers through various functions....

    • <PRODUCT FEATURES>

    Stable Power Control
    SMPS Mode DC Power Supply Design
    Programmable Power Ramping
    Air / Water Cooling
    User Interface for Easy Operation
    RS-232 / RS-485 / Analog Interface

    <APPLICATION>

    Descum Process
    PECVD system
    Dry Etch system
    Sputtering system
    OLED system
    Atmospheric plasma system

    <PRODUCT LINE-UP>

    Power

    100kHz

    400kHz

    750kHz

    2MHz

    3.2MHz

    4MHz

    13.56

    MHz

    27.12

    MHz

    40

    MHz

    600W

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    1.5kW

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    3kW

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    5kW

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    10kW

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    15kW

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    ■ : Released ● : Product Available ▲ : Splitter Matcher ★:Developing

Categories

208 Test Equipment
  • Circuit Repair; Design Modification; Redundant Memory Repair; Mask Repair Systems
    • 401 Sub-systems
  • Plasma Sources; Controls; Monitoring; Diagnosis
  • Power Supplies; RF Generators; Converters; Electrical Conditioning
    • 700 Manufacturing Services
  • Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
  • Used; Rental Equipment; Inventory Reduction, Appraisal - Brokers; Resellers
    • 701 Manufacturing Services or Consulting
  • Test Services or Consulting

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