Precitec Optronik GmbH

Introducing the Flying Spot Scanner 310, a game-changer for the semiconductor industry. This innovative OCT measurement system is purpose-built to deliver high-speed, accurate measurement of distance, thickness, and topography.

The secret to its remarkable performance lies in its groundbreaking in-built scanning system. By replacing linear axes with rotary movements, it achieves an unparalleled level of speed and precision.

But that's not all – the Flying Spot Scanner 310 takes semiconductor quality control to the next level. In a single scan, it effortlessly captures data on Total Thickness Variation (TTV), bow, and warp, streamlining your assessment process like never before. 

Speed and precision are the outstanding features of this device, making it an indispensable tool for semiconductor manufacturing. When accuracy is non-negotiable, the Flying Spot Scanner 310 ensures error-free measurements, empowering you to make well-informed decisions with confidence.

Precitec´s dedication to innovation has earned us the prestigious SPIE Prism Award 2023. This recognition reflects our unwavering commitment to pushing the boundaries of what's possible in the semiconductor industry. Embrace the future of semiconductor quality control – experience the Flying Spot Scanner 310.

In the world of high-speed inspection, the next generation CHRocodile CLS 2Pro is a true market leader. Its uniqueness lies in the exceptional combination of a line length of 8 mm with an acceptance angle of 38°. This innovative feature, coupled with outstanding lateral microscopic resolution, a high point density of 21 million measurement points and a lightning fast scanning speed of 36,000 lines per second, makes the CHRocodile CLS 2Pro a confocal line scan sensor that outshines the competition.

This sensor is perfect for a variety of inspection applications where speed, accuracy and flexibility are paramount. It eliminates any concerns about shadowing, making it the ideal choice for professionals and industries that demand precision and efficiency. The CHRocodile CLS 2Pro is the future of high-speed inspection, offering a unique and unbeatable combination that sets new standards in the field.

Enovasense has developed an innovative laser technology to measure the thickness of all kinds of coatings e.g. silicon carbide coatings on graphite susceptor parts. It enables fast, non-contact, non-destructive measurement of any coating used for semiconductor production equipment – without damaging the material measured. 

The manufacturing of semiconductor wafers and microelectronic components involves hundreds of steps over several weeks, making inline quality inspection crucial to avoid wasted time and cost due to defects. As components become smaller and more complex, quality inspection demands become stricter. Precitec's chromatic confocal measurement technology offers ultra-precise measurements, especially on complex geometries with steep surfaces and varying material

The chromatic confocal line sensor CHRocodile CLS 2 quickly determines the 3D structure of your sample with extremely high lateral and axial resolution. Its straight confocal setup eliminates shadowing effects, allowing for precise measurements of complex geometries, such as the tiny wire bonds that connect chips to their package. 

Furthermore, the easily exchangeable optical probes offer a high degree of flexibility in adapting the sensor’s specifications to your requirements.