Brooks Instrument GmbH

Zur Wetterwarte 50
Geb. 337/B
Dresden,  D-01109

  • Booth: B1654

The global leader in precision fluid measurement & control.

Brooks Instrument is a company of highly trained specialists with service locations world-wide. We work in close cooperation with international end users and are default at most of the global operating OEMs.

Our precision process instrumentation for flow, vacuum and pressure applications is focused on semiconductor manufacturing.

Brooks Instrument GmbH is your partner for semiconductor manufacturing in the heart of Europe. A dedicated sales team will help you to select the optimal solutions for your measurement or control needs and provide you the optimal services.

 Press Releases

  • HATFIELD, Pa. (USA), September 28, 2023 — Brooks Instrument, a world leader in advanced flow, pressure and vapor delivery solutions, has opened a new manufacturing facility in Penang, Malaysia, significantly increasing its operational footprint in Asia-Pacific for producing mass flow controllers (MFCs).

    The brand-new 57,000-square-foot plant follows the company’s recent manufacturing expansion in Korea and is Brooks Instrument’s fourth global production area. The other locations are in the U.S. and Hungary.

    The Malaysian site features Brooks Instrument’s largest Class 100 clean room manufacturing area and will focus initially on producing the company’s GF100 series of mass flow controllers. The GF100 is widely used in semiconductor and other critical gas flow control applications and is often viewed as the semiconductor industry standard for reliable and repeatable delivery of process gasses.

    Hans Sundstrom, global semiconductor business unit manager for Brooks Instrument, said the expansion into Malaysia was a result of partnering with semiconductor industry customers who wanted a more robust and efficient supply chain for getting MFC products and support.

    “Brooks Instrument has operated in Japan, Korea and China for decades. The high demand and semiconductor industry growth in the Asia-Pacific region led us to invest in another factory, this time in Malaysia,” said Sundstrom. “Our expansion into a high-volume manufacturing plant will enable us to eventually double our global output of MFCs. It will also serve as an additional location for manufacturing and parts inventory, complementing our other facilities and further reducing the risk of a supply chain disruption.”

    “We are ready to start our shipments to customers beginning in December 2023 and expect to be in full production mode by January 2024,” said Lik Wai Kho, Brooks Instrument vice president and general manager of the semiconductor business in Asia. “Our Malaysian personnel have completed extensive training, including copy-exact procedures at our headquarters facility in the U.S., and I am confident in our preparedness to build the high-quality products that have made Brooks Instrument such a trusted partner in this industry.”

    About Brooks Instrument:

    Since 1946, Brooks Instrument has been a leader in precision fluid measurement and control technology. Providing instrumentation for flow, pressure and vapor delivery, the company serves customers in semiconductor manufacturing, fiber optics, thin film manufacturing, solar cells, LED, pharmaceutical, biopharmaceuticals, alternative energy, oil and gas, and chemical and petrochemical.

    With manufacturing, sales and service locations in the Americas, Europe and Asia, Brooks Instrument has the world’s largest installed base of mass flow controllers.

    For more information, please visit www.BrooksInstrument.com. The company is also on LinkedIn (www.linkedin.com/company/Brooks-Instrument) and YouTube (www.youtube.com/user/Brooks407).

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  • GP200 Series Metal Sealed P-MFCs
    GP200 Series is the industry’s first fully (both inlet and outlet) pressure insensitive P-MFC, designed specifically for critical gas chemistry control applications....

  • The GP200 platform provides the most precise process gas delivery over the widest range of operating conditions, for drop-in replacement and upgrade of many traditional pressure-based and thermal mass flow controllers. The GP200 enables tighter process control with its patented differential pressure technology, downstream valve architecture and ultra-fast, highly repeatable transient response.

    Key features:

    • Full Scale flow ranges configurable from 3 sccm to 50,000 sccm (N2 equivalent)
    • 1% process gas accuracy from 100% down to 5% of configured range
    • Ultra-fast, highly repeatable ascending & descending flow stabilization time
    • Low inlet pressure operation for critical Etch gases & insensitive to downstream pressure changes
    • Embedded gas model for on-the-fly gas and flow range configuration with digital command
    • Zero leak-by valve (ZLV) option to address first wafer effect
  • GF100 & GF101 Series Metal Sealed Thermal MFCs
    With over 1 million devices shipped, the GF100 Series and the GF101 Series are widely considered the workhorse of the semiconductor industry....

  • GF100 and GF101 Series MFCs are used in high volume manufacturing across all process segments including deposition, etch, strip, ion implant, patterning, diffusion, polish, and RTP.
  • XacTorr Series Capacitance Manometers
    The XacTorr® CMX Series capacitance manometers (or capacitance diaphragm gauges) are highly-accurate vacuum measurement gauges....

  • The CMX utilizes a corrosion resistant Inconel sensor for compatibility with all process chemistries, and its unique sensor design incorporates industryleading features that improve measurement stability by protecting the measurement diaphragm from process byproducts and thermal effects.

    CMX is widely utilized on semiconductor processes including etch, deposition, diffusion and on-tool metrology as well various industrial applications including thin film processes and lyophilization. 

    Key features:

    • Available in ranges from 100 mTorr to 1000 Torr
    • Highly corrosion resistant, shielded Inconel Sensor for up to 2x longer operational life
    • 0.15% S.P. Accuracy • Unheated, 45°C, 100°C, and 160°C heated configurations for optimum process computability

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