With its amc series amcoss offers fully automatic single-wafer processing equipment for coating, developing, lift-off, etching, cleaning, heating/cooling and lift-off of wafers and other substrates. Every customer individually sets up their equipment according to their requirements as far as throughput and desired processing options are concerned.
All amc models are adaptable platforms, so that individual configurations and process solutions are standard with amcoss. The footprints, however, are very compact and room saving. With, e.g. amc 1000 you will find 3 processes, 1 wafer-handling-station and up to 4 I/O stations on about 1,4 m² and you may flexibly process wafer sizes between 2“ and 8“.
Every amcoss amc tool may be optimized either for flexible single processes or high throughput. Choosing the appropriate production equipment resulting in increased efficiency in various respects is a highly influential aspect of sustainability for a company and their products.
Process, cost, and machine efficiency
Almost all features of the amc tools, e.g. linear motor drive for nozzle positioning or our special EBR solutions, have been configured to enable and optimize flexible processes. Besides, ams PILOT software independently controls processes in every equipment and therefore highly contributes to that fact. So, throughput, as well as quality of the finished product increase, reject diminishes, downtime and prevention costs go down and time is being saved.
Optimized processes, attractive purchasing costs, a very good return on investment, low maintenance and spare parts costs, and longevity of all components contribute to raising cost efficiency. Moreover, flexible process options and the great variety of processable substrates help to increase machine efficiency and reduce time for retrofits. Furthermore, the compact footprints of the amc equipment, as well as the option of a genuine through-the-wall installation save expensive cleanroom capacity.
Environmental protection is getting increasingly important in all aspects of life and it is also a heartfelt matter for amcoss, reflecting in our equipment. Thanks to the energy save mode of our ams PILOT software and the unique amcoss dispense system, an option for media re-use and the recycling of dissolved metals in the lift-off process, as well as other clever features, not only resists and media, but also energy can be saved. Consequently, there is less reject and waste. Because various processes can be run within one compact machine, its ecological footprint is generally smaller. At last, we try to keep our supply chain regional wherever possible.
Sustainability may not only be limited to technology but has also to focus on humans. Production equipment has to be simple, comfortable and safe in operation. Our singular amc operation concept shows in all aspects of our amcoss equipment – in our user-friendly ams PILOT software and a machine design enabling easy access to the modules, which can be effortlessly installed or removed, as well as in easy process adjustment. Moreover, many integrated features increase operator safety.