With a rugged and flexible configuration, the TOFWERK Semicon Process Solutions use electron ionization time-of-flight mass spectrometry to simultaneously detect and analyze all precursors, byproducts, and trace species in real time. Equipped with powerful, high-speed software, our process analyzers are designed to handle challenging process requirements and enable fast, non-intrusive detection of process deviations in semiconductor processes.
More information at: https://www.tofwerk.com/products/clearfab-process-solution/
Contact our team: [email protected]