Due to the extreme susceptibility of silicon wafers to contamination by other substances, they are generally carried out in a vacuum environment. In this environment, most robotic arms made of materials are generally difficult to complete their work, and the materials used to make robotic arms require high temperature resistance, wear resistance, and high hardness. Advanced ceramic materials can precisely meet these conditions. There are three main types of ceramic robotic arms, one is alumina ceramic robotic arms, and the other two are black ceramic and composite ceramic robotic arms. These ceramic materials all possess physical properties such as high density, high hardness, and high wear resistance, as well as good heat resistance, excellent mechanical strength, good insulation in high-temperature environments, and good corrosion resistance. They are excellent materials for making semiconductor equipment robotic arms.