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Werner Lieb GmbH & Co. KG

Brückenstraße 32
Rödental,  96472

Germany
http://www.werner-lieb.de
  • Booth: B2473


LIEB HANDLING SOLUTIONS FOR SEMICONDUCTOR INDUSTRY

Tailor-made automation and reliable handling solutions are our area of expertise. As your partner for customized handling solutions, like end effectors, prealigner,  SMIF load ports, EFEMs up to fully integrated 3rd party module systems, LIEB offers the full vertical manufacturing depth from idea, concept development to manufacturing, assembly and testing. Using top-notch own and selected partner software / programing solutions leads to a product portfolio ranging from components to fully automated customized special machines. With our solutions, we supply leading companies in the semiconductor and power electronics industry as well as in the areas automotive and life science.


 Products

  • LP200-SMIF
    LP200-SMIF load port series is capable to load SMIF pods for 200 mm wafer as well as RSP200 and EUV pods for reticles. All versions are available as bolts interface and table top version....

  • LIEB offers a wide range of load ports for wafer as well as for reticles. Beside the classic open cassette load ports for cassettes handling 4" wafer up to 200 mm wafer, LIEB designed the LP200-SMIF series exclusively for SMIF pod handling. The SMIF pods can include either wafers or reticles. With the LP200-SMIF R, LIEB is proud to announce it´s latest development of SMIF load ports capable to hanlde RSP200 and EUV mask SMIF pods. 
  • EFEM
    LIEB offers customized Equipment Front End Modules (EFEM) for all kind of tools in the semiconductor manufacturing area....

  • As special machine manufacturer for the semiconductor industry LIEB designs and manufacturers tailormade Equipment Fromt End Modules (EFEM). The EFEM can be equipped with various options, like prealigner, end effector exchange station, flip station and other modules your process might require. In addition you can choose between a wide range of load ports. If you have any need for an EFEM fitting to your module or tool, please contact us. We are sure we find the perfect solution matching your needs.

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