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Thermo Electric Company BV

Lange Nieuwstraat 34
Westerlo,  2260

Belgium
https://www.thermo-electric.com/
  • Booth: B0314


Thermo Electric and Corrège Sensors - Instrumented wafers

Thermo Electric Co Inc.   *   Corrège Sensors

We manufacture instrumented Wafers, which are being used in many industries including applications such as Rapid Thermal Processing (RTP), Rapid Thermal Annealing (RTA), Post Exposure Bake (PEB), Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), ION Implantation, Solar Cell, and many other thermally driven processes.

We have the expertise to design and install our thermocouples on a large range of substrates including Silicon, AlTiC, Glass, Ceramic and other supplied Bare,
Coated, or Patterned substrates. Other custom substrates, shapes and sizes available.

Product line:

* Surface Mounted Thermocouple Wafers for Temperatures up to 1,200°C

* RTD Wafers

* Bonded Thermocouple Wafers

* Spike & Profile Thermocouple Probes

* Our data acquisition system TEDAQ and temperature mapping software tools allow for accurate capture and analysis of temperature data of any type of instrumented wafers

For more information about our Instrumented Wafers innovative solutions, please contact us at: [email protected]


 Press Releases

  • (20231003)

    Thermo Electric is looking forward to meeting you at the next Semicon West Trade Show in order to present our Instrumented Wafers Solutions.

    The Semicon West Trade Show will be held in San Francisco, California at the Moscone center from the 11th- 13th of July.

    Please visit us at our Booth 5779 where you will see the variety of solutions and services that we offer to meet your temperature measurement needs.

    Thermo Electric manufactures temperature measurement solutions that are guaranteed to give you sensitivity, fast response and consistent accuracy with greatest sensor to sensor uniformity. Thermo Electric is committed to deliver its innovative instrumented wafer solutions on time with a world class technical service.

    For more information about the show, please contact us at: [email protected]

    For more information about the show, please visit their website: http://www.semiconwest.org/

  • We are proud to announce that our USA Thermo Electric factory is now fully accredited with ISO-17025 from ANSI National Accreditation Board (American National Standards Institute).

    Our ISO-17025:2017 confirms the expertise of our team in the calibration of temperature measurement solutions. Our certification underscores the quality of our processes, key to the quality of our solutions.

    It is our top commitment at Thermo Electric to deliver the highest temperature measurement accuracy to help our customers optimizing their processes. This certification proves it.

    Our calibration and measuring capabilities are as below:

    For RTD’s
    0.05°C in the range of -40 to 350°C

    For Thermocouples
    0.069 °C in the range of -40 to 350°C

    Thermo Electric is committed to relentlessly improve its Quality Management System in order to provide world class services to its customers.

    Please click on the below link to get our latest ISO 17015:2017 certificate:

    Thermo Electric ISO 17025:2017 Certification

    For any inquiries or questions regarding our Calibration Services, please contact us at: [email protected]


 Products

  • Instrumented Wafers Data Acquisition Solution
    Thermo Electric’s data acquisition (TEDAQ) and temperature mapping software tools allow for accurate capture and analysis of temperature data of any type of instrumented wafers...

  • Thermo Electric’s data acquisition (TEDAQ) and temperature mapping software tools allow for accurate capture and analysis of temperature data of any type of instrumented wafers.
    The TEDAQ provides fully integrated, multipoint temperature measurement on the instrumented wafer assemblies.
    Our TEDAQ offers a hardware and software embedded solution which can be easily adopted to any size wafer and up to 64 thermocouple inputs.
    TEDAQ Software is compatible with latest Windows operating systems.

  • Thermocouple wafers up to 1200°C
    TC-350H/D — High Performance or Heavy Duty (-50°C to 350°C) ** ** TC-700H/D — High Performance or Heavy Duty (-50°C to 700°C) ** ** TC-1200 — High Temperature / High Purity (-50°C to 1,200°C)...

  • TC-350H — High Performance — Temperature Range (-50°C to 350°C) 

    The TC-350H uses the smallest possible sensing elements to reduce thermal mass and increase the response time of each sensor. The material used to fabricate the sensors is carefully chosen for the highest possible accuracy and greatest sensor to sensor uniformity.

    This design finds application where knowing and controlling the temperature at the surface of a silicon wafer is critical. Most manufacturers embed their sensors within the wafer’s core. This product focuses its measurement at the wafer’s surface where the most vital processes occur. In using this product you can expect faster and more accurate response times resulting from the most accurate placement of the sensing elements.

    While these products are typically used throughout the semiconductor industry, this technology can also be used to measure the temperature uniformity of any other two dimensional surface.

    The TC-350 wafer products employ Thermocouple technology to produce the most accurate and reliable readings.

    TC-350D — Heavy Duty — Temperature Range (-50°C to 350°C)

    The TC-350D uses the most rugged components to increase the lifespan of these often fragile products. The material used to fabricate the sensors is carefully chosen for the highest possible accuracy and greatest sensor to sensor uniformity.

    This design finds application where knowing and controlling the temperature at the surface of a silicon wafer is critical. Most manufacturers embed their sensors within the wafer’s core. This product focuses its measurement at the wafer’s surface where the most vital processes occur. In using this product you can expect faster and more accurate response times resulting from the most accurate placement of the sensing elements.

    While these products are typically used throughout the semiconductor industry, this technology can also be used to measure the temperature uniformity of any other two dimensional surface.

    The TC-350 wafer products employ Thermocouple technology to produce the most accurate and reliable readings.

    TC-700H — High Performance — Temperature Range (-50°C to 700°C)

    The TC-700H uses the smallest possible sensing elements to reduce thermal mass and increase the response time of each sensor. The material used to fabricate the sensors is carefully chosen for the highest possible accuracy and greatest sensor to sensor uniformity.

    This design finds application where knowing and controlling the temperature at the surface of a silicon wafer is critical. Most manufacturers embed their sensors within the wafer’s core. This product focuses its measurement at the wafer’s surface where the most vital processes occur. IN using this product you can expect faster and more accurate response times resulting from the most accurate placement of the sensing elements.

    While these products are typically used throughout the semiconductor industry, this technology can also be used to measure the temperature uniformity of any other two dimensional surface.

    The TC-700 wafer products employ Thermocouple technology to produce the most accurate and reliable readings.

    TC-700D — High Duty — Temperature Range (-50°C to 700°C)

    The TC-700D uses the most rugged components to increase the lifespan of these often fragile products. The material used to fabricate the sensors is carefully chosen for the highest possible accuracy and greatest sensor to sensor uniformity.

    This design finds application where knowing and controlling the temperature at the surface of a silicon wafer is critical. Most manufacturers embed their sensors within the wafer’s core. This product focuses its measurement at the wafer’s surface where the most vital processes occur. IN using this product you can expect faster and more accurate response times resulting from the most accurate placement of the sensing elements.

    While these products are typically used throughout the semiconductor industry, this technology can also be used to measure the temperature uniformity of any other two dimensional surface.

    The TC-700 wafer products employ Thermocouple technology to produce the most accurate and reliable readings.

    TC-1200 — High Temperature / High Purity — Temperature Range (-50°C to 1,200°C)

    The TC-1200 takes advantage of a very unique attachment method to allow for extremely high temperature operation. This method does not employ the use of bonding agent. Instead, the silicon is laser welded to hold the sensor in place.

    Not only does this allow for high temperature operation, but it also creates one of the cleanest designs available. By eliminating the bonding agents there is no possibility of out gassing or other undesirable conditions.

    This design finds application where knowing and controlling the temperature at the surface of a silicon wafer is critical. Most manufacturers embed their sensors within the wafer’s core. This product focuses its measurement at the wafer’s surface where the most vital processes occur. In using this product you can expect faster and more accurate response times resulting from the most accurate placement of the sensing elements.

    While these products are typically used throughout the semiconductor industry, this technology can also be used to measure the temperature uniformity of any other two dimensional surface.

    The TC-1200 wafer products employ Thermocouple technology to produce the most accurate and reliable readings.


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