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Fabmatics GmbH

Zur Steinhöhe 1
Dresden,  D-01109

Germany
https://www.fabmatics.com
  • Booth: B1221


Smart Manufacturing with Material Handling Automation

Fabmatics develops intelligent automation and robotics solutions for customers from the semiconductor and electronics industry and helps so to make their production more efficient, faster and safer.

Founded in 1991, the company has been successfully implementing customer-specific automation projects in the semiconductor industry for more than 30 years. This results in a strong market position, especially in the modernization of 200-millimeter semiconductor factories worldwide.

Our product portfolio includes mobile robots, robot cells, automated transport and storage systems, product identification & localization solutions, purge systems and more. Fabmatics has the unique competence to offer customer-specific automation, robotics and handling solutions for the use under cleanroom conditions, including both hardware and software, from consulting and development to production, installation and after-sales service from a single source.

Fabmatics, including its subsidiary Fabmatics USA Inc. in Utica (New York), is world-wide active and employs at present approximately 300 employees.

 Products

  • HERO®FAB - Automated Guided Vehicle (AGV)
    Unique AGV for high-precise loading and efficient transportation jobs...

    • This automated guided vehicle carries out transport jobs between process tools and handling tasks in loading and unloading process tools without manual assistance. The HERO®FAB combines an established, clean and safe robot system, with an innovative vehicle (AGV). It is designed to fully automatically load and unload process tools and to enable fast transportation between process tools and the fab transport system or stockers/shelves in the cleanroom.  Learn more

  • HERO®Rail - Rail Guided Vehicle (RGV)
    Rail-guided transport and automated handling system for wafer casettes....

    • This rail guided robot by Fabmatics is able to load and unload process tools and enables a fast carrier transportation from process tools to the transport system in the cleanroom. The HERO®Rail combines a new robot system with an innovative drive unit. It is designed to fully automatically load and unload process tools, and enable fast transportation between process tools and the transport system in the cleanroom. The main focus and challenge lie in the interactive co-operation between human and machine – operator and robot. Learn more

  • CubeStocker - Storage System
    The CubeStocker is a space-saving solution for the intermediate storage of product carriers, such as open 200mm wafer carriers....

    • The CubeStocker is a floor-based fully automatic storage system for open 200mm wafer carriers. The automatic input and output for this system is done e.g. via an overhead transport system (Conveyor). Learn more

  • FlatStocker - Automated Carrier Storage System
    The FlatStocker is an innovative system to store material carriers e.g. for open wafer cassettes and H200 boxes underneath the cleanroom ceiling....

    • This innovative system is the ideal solution for the space-saving storage of material carriers e.g. open wafer cassettes and HA-200 boxes where floor space is limited and very valuable. Without using costly clean room floor space, the FlatStocker hangs from the ceiling and can be designed to handle variety of cassette types. The FlatStocker provides carrier id information, in real time, to the customer’s MCS (Material Control System) using RFID and barcode technology. Learn more
  • FOUP Purge System
    Retrofittable Purge System reliably protects wafers between process steps....

    • The retrofittable Purge System by Fabmatics purges FOUPs with an inert gas during interim storage. Thus, it reliably protects wafers between process steps from undesired chemical reactions due to humidity and evaporation. Learn more
  • RFID & Localization in Your Production
    Our customized RFID and real-time location systems always ensure a transparent material flow in your cleanroom production at all times and convince with their best price-performance ratio....

    • RFID solutions

    In order to quickly and easily identify materials in the production process, we offer customer-specific RFID systems in various frequency ranges. These are especially designed for use in cleanrooms, are able to be integrated smoothly at various points, and they support established interface standards. Our current product portfolio includes RFID read/write devices in the LF and HF range, matching antennas and other accessories. RFID-based logistics applications such as RFID trolleys and RFID racks complete the product range.

    FAB-LIPS – Local Identification & Positioning System

    FAB-LIPS is a real-time locating system (RTLS) based on ultra-wideband (UWB) technology for indoor positioning of batches or other objects in semiconductor manufacturing plants. Whether during transport, in storage or on loadports – the system enables reliable 3D positioning of hundreds of objects everywhere in the fab without extensive infrastructure such as an RFID reader per storage bin.

    Learn more

Categories

502 Material Handling Systems
  • Conveying; Material Handling Systems
  • Robotics; Transfer Systems
  • Stockers; Storage, AMHS
    • 602 Manufacturing Software
  • Factory Automation; Cell Controller Software
    • 700 Manufacturing Services
  • Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
    • 701 Manufacturing Services or Consulting
  • Automation & Robotics
  • Wafer Handling

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