S3 Alliance GmbH

Mahdenstr. 23
Kirchentellinsfurt,  72138

  • Booth: B1907

Experts of the Semiconductor/MEMS market welcome you.

S3 Alliance is a distribution company providing following products for the Semiconductor/MEMS market:

  • Equipment: new and remanufactured CMP, Backgrinding, Taping-Detaping-Mounting, Scribe and Break, ALD and Cleaning, Plasma Etch, RIE, ICP, Asher, Descuum, PECVD, Ultrasonic Spray Coating, Spin Coating, CPD (Critical Point Dryer).
  • Metrology and Automation: EFEM, Wafer Loaders, Flat/Notch Aligners, manual handling Tools, Thickness measurement, H2 Impurity Measurement, UV Lights, Ultrasonic Flow measurement, Scanning Electronic Microscope (SEM)
  • Parts & Consumables: Retaining Ring, Diamond Conditioners, CMP Pads, Grinding Wheels, Shipping boxes (new and reconditioned), Cassettes (PFA, PP, PE, PEEK), O-ring replacement for Kalrez; CMP Parts, Chamber Cleaning Materials, Chemical and DIW Heaters, Chemical Pumps.
  • Services: Robot repair for Yaskawa, Kawasaki, Brooks, PRI, Equip and Genmark. LFM repair Cryo Pumps repair and refurbishment, Power supply repair. Cleaning solutions: Cleaning pads and kits for all type of chambers, Microfiber wipers.


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