piezosystem jena GmbH

Stockholmer Str. 12
Jena,  D-07747

Germany
http://www.piezosystem.com
  • Booth: B2870


Your Partner for Piezo Solutions to the Semiconductor

piezosystem jena is a worldwide developer and manufacturer of high-precision piezo equipment. piezosystem jena has a strong focus to create customized solutions for industrial and research applications. Through its more than 25 years of existence, piezosystem jena has worked together with leading OEMs in the fields of semiconductor, photonics, metrology, aerospace, and the automotive industry. Together with our customers, we have developed systems that can achieve extreme levels of precision, high force generation, or stable high-frequency linear and tip-tilt movements.

piezosystem jena has two major lines of products: Low Power Stages and Actuators for positioning and frequency generation, used in microscopy, spectroscopy, laser positioning, 3D scanning, space applications, probes and wafer handling, and autofocus systems. High Power Actuators for shock generation, fatigue testing, shaker systems, and vibration testing. piezosystem jena´s team of experts knows everything about motion and we share this passion with our customers. Reliability and excellent performance are the key factors of piezosystem jena´s success.

 Products

  • MIPOS objective/lens positioners
    MIPOS objective/lens positioners allow a microscope or other optical device to precisely focus and act as a piezo scanner with sub-nanometer resolution. These positioners are used in Semiconductor industry, for example in wafer inspection machines....

    • MIPOS objective/lens positioners allow a microscope or other optical device to precisely focus and act as a piezo scanner with sub-nanometer resolution. These high quality positioners are simple to attach to standard microscopes and provide a quick easy way to upgrade a microscopy system.

    The z-axis actuating system for precise objective positioning is made for applications such as single photon microscopy, laser scanning microscopy, and confocal microscopy. In general, for all kinds of very precise high resolution microscope scanning. The MIPOS piezo lens positioner is able to move the optical objective lens with unique position repeatability in the sub-nanometer range. The piezo objective positioner reacts immediately if the controller signal is adjusted. This solution offers high speed and high dynamic performance as a piezo objective slide scanners, confocal scanners and other types of optical scanners and microscopes.

    A piezoelectric actuator is mounted in a unique lever transmission design of flexure hinges. The small motion of the actuator, caused by an analog control signal, is transferred to a special point. The sophisticated monolithic guidance design of the solid flexure hinges means the trajectory is free of mechanical play and friction – a feature of all piezosystem jena stages. Due to this technology, the motion is parallel to the optical beam. The resolution is very high and in practice only limited by the voltage noise of the power supply. This is why we can guarantee high accuracy only when also using piezosystem jena electronics.All MIPOS systems can be equipped with an integrated positioning feedback sensor to check and control the exact accuracy of these fine focus scanner systems.


    Piezo focus fine scanner adjustment


    Compact design


    Parallelogram design with high resonant frequency


    Parallel motion inside the optical beam


    Easy to attach on microscopes


    Flexible use on different microscopes and in other optical systems


    Cost effective solution for fine adjustment on the microscope


    Available as “upside-down” versions for inverse microscopes

  • NV200/D NET
    The NV200/D controller is built to deliver powerful high-resolution signals offering a wide variety of control options including ethernet and USB – C. With 400 mA of peak current, the system can provide high frequencies and fast response times....

    • The NV200/D NET is a digital piezo controller with a serial and an ethernet interface for local and remote control and servicing of piezo actuators. The user can drive quasi static or dynamic step positioning applications through the network access, allowing for more flexibility and use in critical environments. For high dynamical applications, a real time SPI inter-face is implemented.The amplifier can drive piezoelements with up to 400 mA. With a 16 bit resolution, the NV200/D NET guaran-tees high positioning accuracy and low noise.


    The NV200/D NET can automatically recognize actu-ators and adjust control parameters from stored information in the EEPROM connector. The NV200/D NET can be used with actuators equipped with either strain gauge or capacitive sensors, as well as with actuators without measurement system. The NV200/D NET also supports actuators based on pie-zosystem jena’s own NanoX® bi-directional actuating technology.


    Features:
    The NV200/D NET has an automatic sensor calibra-tion (ASI / ASC) function. All values of the actuating system, like serial number of the actuator, actuator name, control parameters and filter settings, are stored in the actuator plug. This allows an easy ex-change of actuators or controllers. A digital PID controller is integrated in the device. The user can change the values according to his or her current setup. For repetitive motion patterns, an iterative learning control (ILC) algorithm can be used to achieve highest tracking precision. In this way, the NV200/D NET can achieve closed loop precision at open loop speeds. Due to its trigger input and output functions additional units of the NV200/D NET can be synchronized to control multiple axes.

  • PZ 250 CAP WL
    The PZ 250 CAP WL has been developed for the precise positioning of wafers with diameters up to 12”. It is well suited for applications in the semiconductor industry, solar panel production, lithography, mask inspection among others....

    • The PZ 250 CAP WL has been developed for the precise positioning of wafers with diameters up to 12”. In closed loop operation, the actuator offers a motion in Z–direction of 250 μm. Equipped with a capacitive sensor, that overcomes hysteresis and drift, single steps in nanometers can be achieved. Specified positions can be hold with high stability for a long period of time. The PZ 250 CAP WL is well suited for applications in the semiconductor industry, solar panel production, lithography, mask inspection among others. The PZ 250 CAP WL offers a fast positioning in milliseconds. The repeatability is in nanometer range. Due to the high stiffness, the PZ 250 CAP WL can carry loads up to 3 kg.
  • TRITOR 320
    The capability to move loads up to 20 kg make the TRITOR 320 one of the most robust piezo driven 3D positioning stages available on the market. The stage can be equipped with an integrated feedback sensors for closed-loop control....

    • The capability to move loads up to 20 kg make the TRITOR 320 one of the most robust piezo driven 3D positioning stages available on the market. The stage can be equipped with an integrated feedback sensors for closed-loop control. The capability to move loads up to 20 kg make the TRITOR 320 one of the most robust piezo driven 3D positioning stages available on the market. The stage can be equipped with an integrated feedback sensors for closed-loop control. The unique design of the flexure-hinges allow for excellent usability with zero friction.

    High stiffness, in combination with excellent straightness of motion, makes the TRITOR 320 ideal for high precision positioning in the nanometer range of heavy objects such as wafer chucks, bonding tools, and pick & place platforms.

    Piezoelectrical actuators can act much faster, and with a higher accuracy to a signal change, than any motorized drive available. The resolutions of piezoelectrical actuators are only limited by the signal noise of the control system. Therefore, these piezo solutions are an excellent choice for positioning applications in fiber alignment, optics, wafer handling, medical equipment, etc. Each axis can be controlled separately in closed loop mode. An integrated sensor system is an available option that guarantees accuracy in the nanometer range.

Categories

201 Flat Panel Display Equipment
  • Panel Alignment; Cell Assembly Equipment
  • Scribe and Break Equipment
  • Seal Patterning Equipment
    • 202 Other Equipment
  • Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating
  • Vibration Isolation Systems
    • 203 Inspection & Measurement Products
  • Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation
    • 205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 207 Process Equipment
  • Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
    • 208 Test Equipment
  • Probing Equipment incl. Analytical; Circuit; Manual; E-Beam; Optical; Wafer Probers
    • 400 Components, Parts & Accessories
  • Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
  • Piezo Electronic Components
    • 401 Sub-systems
  • Motion control systems; Servo control systems & Components

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