Precitec Optronik GmbH

Schleussnerstraße 54
Neu-Isenburg,  D-63263

Germany
http://www.precitec.com
  • Booth: B1165


Welcome to the world of Precitec 3D Metrology.

Precitec 3D Metrology presents the CHRocodile sensors for topography and thickness measurements at the Semicon. It allows to measure structures, thickness, bow and warp from sub-microns to microns. The CHRocodile sensors feature high measuring rates. They allow precision measurements and are able to be used as standalone sensors or integrated into production machines for inline measurements.

They are proven at major semiconductor manufactorers in the world and are implemented in production machines for numerous types of quality control.

Precitec sensors have the following advantages:

  • Precise measurements independent of the surface type

  • High axial resolution for the measurement of intricate structures

  • Measurements also on highly titled, reflective and dispersive surfaces

  • Small spot diameter

  • Robust and compact design


 Products

  • Flying Spot Scanner 310 + CHRocodile 2 IT
    Winner of SPIE Prism Award 2023. The Flying Spot Scanner 310 is capable of capturing crucial data on Total Thickness Variation (TTV), bow, and warp in a single scan....

  • Introducing the Flying Spot Scanner 310, a game-changer for the semiconductor industry. This innovative OCT measurement system is purpose-built to deliver high-speed, accurate measurement of distance, thickness, and topography.

    The secret to its remarkable performance lies in its groundbreaking in-built scanning system. By replacing linear axes with rotary movements, it achieves an unparalleled level of speed and precision.

    But that's not all – the Flying Spot Scanner 310 takes semiconductor quality control to the next level. In a single scan, it effortlessly captures data on Total Thickness Variation (TTV), bow, and warp, streamlining your assessment process like never before. 

    Speed and precision are the outstanding features of this device, making it an indispensable tool for semiconductor manufacturing. When accuracy is non-negotiable, the Flying Spot Scanner 310 ensures error-free measurements, empowering you to make well-informed decisions with confidence.

    Our dedication to innovation has earned us the prestigious SPIE Prism Award 2023. This recognition reflects our unwavering commitment to pushing the boundaries of what's possible in the semiconductor industry. Embrace the future of semiconductor quality control – experience the Flying Spot Scanner 310.

  • Line sensor CHRocodile CLS 2Pro
    Unique line length-NA combination for high-speed inspection...

  • In the world of high-speed inspection, the next generation CHRocodile CLS 2Pro is a true market leader. Its uniqueness lies in the exceptional combination of a line length of 8 mm with an acceptance angle of 38°. This innovative feature, coupled with outstanding lateral microscopic resolution, a high point density of 21 million measurement points and a lightning fast scanning speed of 36,000 lines per second, makes the CHRocodile CLS 2Pro a confocal line scan sensor that outshines the competition.

    This sensor is perfect for a variety of inspection applications where speed, accuracy and flexibility are paramount. It eliminates any concerns about shadowing, making it the ideal choice for professionals and industries that demand precision and efficiency. The CHRocodile CLS 2Pro is the future of high-speed inspection, offering a unique and unbeatable combination that sets new standards in the field.

  • CHRocodile 2 DPS - Dual Point sensor
    Wafer thickness measurement of non-transparent wafers. ...

  • Precitec Optronik offers a stand-alone solution that enables non-contact thickness measurement of non-transparent components in both inline and offline production processes. Utilizing the geometry of the structure, the thickness of an object is calculated internally in the CHRocodile 2 DPS using the distance data to the two surfaces and provided directly to the user as a measurement signal.
  • Enovasense
    See the unseen...

  • Enovasense has developed an innovative laser technology to measure the thickness of all kinds of coatings (e.g. metal, ceramic, paint, polymers, glue, etc.). The Enovasense sensors accurately measure the thickness of opaque layers or coatings as well as nanometer-thin coatings. It enables fast, non-contact, non-destructive measurement of any coating – without damaging the material measured.


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