Attolight AG

EPFL Innovation Park, Building D
Lausanne,  1015

  • Booth: B1644

High resolution cathodoluminescence for defect inspection

About us

Attolight build high resolution cathodoluminescence microscopes to detect subsurface defects combined with nanometer scale mapping resolution. We have applications in detecting defects in III-V manufacturing, research & development and failure analysis.

The Internet of Things, Big Data, and Clean Tech rely heavily on performance and innovation in semiconductor materials and devices. We perform quality control during their development and production and help increase performance and accelerate innovation.


- Light Emitting Diodes (LEDs)

- Displays: Specialty LED and µLED structure

- Power & radio frequency devices (GaN, SiC)

- Photonics

- Materials characterization


- Defect Detection and characterization

- Composition metrology

- Doping metrology

- Failure analysis

- Nanostructure characterization

- Carrier dynamics (picosecond time resolved CL) & dynamic SEM

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