Euris GmbH

Waldmeisterstrasse 72
Muenchen,  Bavaria  D-80935

  • Booth: B1478

Machines, Equipment and Consumables for Semiconductor and PV

ARRADIANCE: ALD, Atomic Layer Deposition
COREFLOW: Aeromechanical and Air Floating Solutions
CORNING TROPEL: Non-Contact Optical Metrology / Laser Interferometer
DARK FIELD: Inspection Systems for Automated Defect and Particle Detection and metrology
DDL: Dynamic GaN (Power and RF) Device Measurement Systems
ELECTRONIC CONTAINER: Wafer Carrier / Shipper
EURIS: Diamond Scrub Pads, Single Wafer Boxes, 2kW lamps for High-Temperature Epi-Processes, Solid CVD SiC products for Epi and MOCVD Processes
FORMFACTOR / FRT: Non-Contact Optical Surface and Form Metrology, Broadest Cryogenics and Test Products for Quantum Industry
GET CONTROL: E84 /Environmental Monitoring
JANDEL: 4 Point Probe Heads and Source-Meter
LAMBDA–MICROCURE: Variable Frequency Microwave Curing
LUMETRICS: Optical Layer Thickness for Medical Devices, Ophthalmic, Glass
MICROTECH: WET Stations, Gradient Dryer, Chemical Dispense
NANOSYSTEM: Optical 3-D Profiler for Roughness / Form; PCB Inspection
NAPSON: Sheet resistance / Resistivity with 4-pp and Eddy-Current / Carrier Lifetime Measurement
OKAMOTO: Machines for Grinding, Lapping, Polishing, CMP and TSV Processes / Ingot Grinder with XRA
TMC: Precision Vibration Isolation Systems


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