ACM Research Inc.

42307 Osgood Rd.
Unit 1
Fremont,  CA  94539

United States
  • Booth: B1836

Semiconductor equipoment for IC manufacturing, WLP and SiC

ACM Research, Inc. provides advanced processing technology, systems, and key manufacturing products targeted to a range of semiconductor IC manufacturing, wafer-level packaging and SiC manufacturing applications. The company specializes in developing cleaning technologies for advanced semiconductor device manufacturing.

To address increasing challenges in defect reduction that plagued emerging generations of IC chips, ACM Research developed its innovative single-wafer cleaning equipment, which features the company’s proprietary Space Alternated Phase Shift (SAPS™) and Timely Energized Bubble Oscillation (TEBO™) megasonic cleaning technologies. 

Product Lines


Advanced WLP

  • Scrubber Systems
  • Coating Systems
  • Developer Tools
  • Plating Tools
  • Wet Stripping Tools
  • Wet Etching Tools
  • Stress-free Polishing Systems

Compound Semiconductor

  • SPM Cleaning Systems
  • Plating/Deposition Systems
  • Wet Etch Systems
  • Photoresist Removal/Metal Lift-off Systems
  • Post-CMP Cleaning Systems

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