Schorenstrasse 39
Thun,  CH-3645

  • Booth: B2568

TOFWERK - Innovative Solutions for Chemical Analysis.

TOFWERK provides semiconductor solutions for real-time AMC monitoring in semiconductor fabrication processes and sensitive process analysis for R&D and production environments in etch, deposition and lithography processes.


  • TOFWERK Semicon AMC Solution
    Ultra fast. Ultra sensitive. Our AMC monitoring solutions allow you to monitor known and emerging contaminants from diverse molecular categories in real time....

  • TOFWERK Semicon AMC Monitoring provides robust and simultaneous measurements of multiple AMC categories using fast-switching, highly sensitive time-of-flight chemical ionization mass spectrometry. 

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  • TOFWERK Semicon Process Solutions
    Process analyzers for semiconductor R&D and production environments in etch, deposition and lithography processes...

  • With a rugged and flexible configuration, the TOFWERK Semicon Process Solutions use electron ionization time-of-flight mass spectrometry to simultaneously detect and analyze all precursors, byproducts, and trace species in real time. Equipped with powerful, high-speed software, our process analyzers are designed to handle challenging process requirements and enable fast, non-intrusive detection of process deviations in semiconductor processes.

    More information at:

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