YOUR PARTNER FOR EXHAUST GAS TREATMENT
With more than 35 years of experience, CS CLEAN SOLUTIONS GmbH is your reliable partner for exhaust gas abatement in semiconductor, photovoltaic and related industries.
As the global technology leader in our field, our dry exhaust gas abatement does not require the use of fossil fuels or water providing additional benefits to the environment and the climate.
- Exhaust gas treatment for e.g. ion implantation, plasma etching, chamber cleaning, photovoltaics, HDP-CVD, LPCVD, PECVD, MOCVD, ALD
- Safe, dry-chemical conversion of toxic gases into stable solids
- Solutions for research and production
- Global network for service and refill through local partners
The new product line PCS PLASMA CONVERSION SYSTEMS now enhances the CLEANSORB® product portfolio.
PCS TROPO/ PCS STRATO: high-efficiency atmospheric plasma for the removal of perfluorinated compounds (PFCs) emitted during semiconductor etching and related processes. Resource-saving and water-free operation.
PCS EXO: ammonia and hydrogen removal - hybride plasma system for GaN and similar process applications.