Levitronix GmbH

Levitronix^® bearingless pump systems are designed for ultrapure processing of delicate fluids. Based on active magnetic levitation, the pump impeller is suspended and driven by the magnetic field of the motor. The wide gap ensures that there is no mechanical contact between moving parts, making Levitronix^® the purest pump system. There are no seals or bearings to wear out, therefore equipment uptime increases substantially. Additionally, with the liquid hermetically encapsulated in high-performance plastic resins, the pump is extremely resistant against the harshest chemicals. The BPS is also ideally suited for slurries as the wide gap ensures virtually no particle agglomeration.
With its variable speed and high resolution, the BPS series allow for a high controllability over a very wide flow range and all pulsation-free. With constant development over three generations of pump systems, the Levitronix^® BPS has not only become known for its smart pump features and very small footprint but also as a benchmark for the highest reliability.

Levitronix^® bearingless fans are designed for demanding applications in microelectronics manufacturing. Based on active magnetic levitation, the fan impeller is suspended and driven by the magnetic field of the motor. The wide gap ensures that there is no wear and therefore virtually no particle generation, making it the purest fan. As the impeller and stator are completely encapsulated, the fan is extremely resistant against aggressive media and is rated for use in explosive atmospheres. Additionally, without a mechanical bearing, the risk of a fan failure is substantially reduced. All of this leads to an extremely long lifetime. With a pressure or flow sensor connected, the fan can be operated to ensure a constant flow with the very high precision throughout the whole speed range. All within a small footprint with very high power.
From gas supply to exhaust control, Levitronix^® bearingless fans will help improve your yield!

LEVIFLOW^® inline flow sensors are designed for high-precision flow measurement of ultrapure liquids. Two piezoelectric transducers generate and receive ultrasonic waves. When flow is present, the with-stream wave is accelerated, and the against-stream wave is slowed down. The difference in transit time is proportional to the velocity of the fluid. The measurement is completely non-invasive and therefore ideal for ultrapure liquids. With the liquid completely encapsulated in high-performance plastic resins, the sensor is also extremely resistant against the harshest chemicals. Furthermore, selected sensors are available for high temperature applications.
The LEVIFLOW^® inline sensors are compatible with either a single-channel converter, or a multi-channel converter for up to 6 sensor connections.
From low to high flow rates, handling ultrapure water through to aggressive chemistries, LEVIFLOW® inline sensors will help improve your yield!

LEVIFLOW^® clamp on flow sensors LFSC-D are designed for precise, non-invasive flow measurement in microelectronic wet applications. Two piezoelectric transducers generate and receive ultrasonic waves. When flow is present, the with-stream wave is accelerated, and the against-stream wave is slowed down. The difference in transit time is proportional to the velocity of the fluid. The sensor is completely non-invasive which allows for easy reclamping and measurement of high temperature liquids.
The LEVIFLOW^® clamp on sensors are compatible with either a single-channel converter, a multi-channel converter for up to 6 sensor connections or the Levitronix^® console unit for a full turnkey solution.
From low to high flow rates, handling ultrapure water through to aggressive chemistries, LEVIFLOW^® clamp on sensors will help improve your yield.