Process Technology

The ultimate in ultra-pure, deionized water heating

Complete Turn-Key System! Industry leading heating solution is an ultra-pure, ultra-reliable high purity water heater! Utilizing PTFE and PVDF wetted surfaces, the Lufran DI Series is the preferred and industry-leading heating solution for highly-critical semiconductor and flat panel display manufacturing processes. Featuring an advanced temperature control system and sizes up to 312kW, this is the ultimate in ultra-pure deionized water heating. Offers exceptional MTBF of ten years! Thousands of installations worldwide. Worldwide field service support. 99% energy efficient! Heats up to 194°F (90°C)

SHX is a compact high-performance heater designed to safely heat isopropyl alcohol (IPA), meeting the most stringent cleanliness requirements to support next generation semiconductor node technologies.

The newest Process Technology inline solvent heater. SHX is a compact high-performance heater designed to safely heat isopropyl alcohol (IPA), meeting the most stringent cleanliness requirements to support next generation semiconductor node technologies. Chemistry contained within high-purity PTFE components – no contact with any metals. Supports recirculating and single pass flow requirements. This is the ultimate in high-purity solvent heating! Ask about our customized to your tool and explosion proof design (SHX-EX) options. Heats up to 194°F (90°C).

Best-in-class chemical heater

The TIH offers unmatched performance and reliability with the ability to heat a variety of chemicals. This heater is suitable for either single pass or recirculating applications. Delivers best-in-class performance over a wide range of flow and temperature requirements. The TIH is the most durable and long-lasting inline chemical heater available! Multiple plumbing layouts facilitate easy installation into a variety of tool configurations. Fluoropolymer (PTFE) surfaces protect from permeation. 

Outstanding heater performance

Frontier is designed for heating chemicals and solvents in hazardous operating environments. Suitable for heating a wide variety of flammable and non-flammable chemistries using electropolished stainless steel wetted materials for improved cleanliness. Offers outstanding performance over a wide range of flow and temperature requirements. Heat source isolated from flammable chemistries. Certified to UL823 compliant and ATEX

Suitable for Class I, Div 2 and Zone 1 & 2 hazardous environments. Available up to 36kW, the Frontier is the most powerful inline solvent heater available.

Designed for chemical heating performance

The fusion of two successful products, the Lufran Chemical Series offers the safe heating capabilities of Frontier (inline chemical heater) combined. With stainless steel wetted materials this heater is suitable for either single pass or recirculating applications for heating a variety of chemicals. Offers outstanding performance over a wide range of flow and temperature requirements.Indirect heating provides an evenly heated surface. Low watt density design reduces surface temperatures and hot spots Improves chemical longevity and performance for temperature-sensitive chemicals. A complete high wattage turn-key heating solution. Heats up to 356°F (180°C)