Agileo Automation

A²ECF Semi is a software framework for process or metrology equipment control including EFEM (robotics loading platform) management.

A²ECF Semi is intended for equipment manufacturers in the semiconductor, electronics or photovoltaic industries.

Higly customizable, this SEMI E95 compliant framework proposes a standardized way to present user interface for semiconductor applications:

• Multiuser management with access rights (operator, process engineer, field service engineer for example)
• Automatic trace generation with tools to analyze equipment activity
• Operator actions recording
• EFEM devices management such as (contact us for list of supported devices):
  • Wafer handlers with one or dual arms
  • Pre-aligners
  • Load Ports and FOUP Openers
  • Scribe readers
• Schedulers for wafer flow sequencing
• Data collection to the Fab Host and Remote control through SECS/GEM and PV2 interface library Agil'GEM or GEM300 (GEM + 300mm automation standards including in particular Carrier Management, Process Job, Control Job and Substrate Tracking through the integration of Agil'GEM300)

Integration:

A²ECF SEMI can be integrated either by your team after training, or by Agileo Automation team, or both.

Most of the time when we take care of the development, we create the first application based on the basis of specifications that we can write together during a consulting phase. In this case, we are able to commit to a budget and a timeframe up to the tool acceptance at your customer's site, including SECS/GEM connectivity. Developments are carried out using our methodology in order to ensure the expected quality and meet deadlines.​

Agil'GEM is a SECS/GEM and PV2 Software library for semiconductor, electronics and photovoltaic production equipment connectivity.

GEM services:

•     Equipment communication state and control state
•     Process program
•     Collection event sending
•     Variable data collection
•     Status data collection
•     Remote control
•     Alarm management
•     Equipment constants
•     Equipment Terminal Services
•     Clock
•     Trace data collection
•     Limits monitoring

SEMI standards:

•     SEMI E4 SECS-I (serial protocol)
•     SEMI E37.1 HSMS-SS (ethernet protocol)
•     SEMI E5 SECS-II (message format)
•     SEMI E30 GEM

The Agil'GEM library can be integrated directly in Agileo Automation Equipment Controller Framework or in a third party Equipment Controller software through its COM/DCOM or .NET interfaces. The following languages can be used to integrate it C#, VB.Net, Pascal (Delphi), C++.

Open sources integration samples can be provided with the SDK (Software Development Kit) for C#, VB.Net, Pascal and C++. Below, a screenshot of the the C# integration sample.

An interface for PLCs is possible with the GEM4PLC architecture, which allows gateways with specific protocols such as Modbus or OPC-UA. The use of a third party OPC-DA server allows the implementation of gateways with almost all PLC brands on the market, including: Allen-Bradley, B&R, Beckhoff, CoDeSys, Fanuc, Hilscher, Honeywell, InTouch Client, Mitsubishi, Omron FINS, Siemens S5 and S7, Wago, Yaskawa, Yokogawa, etc.

Integration support

Beyond technical integration details, Agileo Automation helps its customers to understand GEM standard to adapt it to a given equipment thanks to a structured approach starting with a good understanding of the equipment

Agil'GEM comes with a free manual version of Speech Scenario, our host simulator software for testing.

Agil'GEM300 is a complete .NET/C# solution for GEM300 connectivity. It handles the complexity of GEM300 automation and provides a simple interface to connect a semiconductor equipment controller application to the factory host.

GEM300 services:

• Management of Carriers and Load Ports
  • Carrier ID Verification
  • Slot Map Verification
  • Both manually and through OHT 
• Management of Process Jobs
• Management of Control Jobs 
• Tracking substrates in the equipment with Substrate ID verification 
• Tracking of Equipment Performance 
• Management of Module Performance 
• Collaboration between standards managed by Agil’GEM300 with minimal integrator interaction 
• Includes Agil'GEM 

SEMI standards :

SEMI standards supported in Agil'GEM300:

• SEMI E-87 - Carrier Management
  • Fixed buffer
  • Internal buffer 
• SEMI E-40 - Processing Managment 
• SEMI E-94 - Control Job Management 
  • Material redirection
• SEMI E-90 - Substrate Tracking
  • Single substrate tracking 
  • Batch tracking 
• SEMI E-116 - Equipment Performance Tracking
• SEMI E-157 - Module Process Tracking 
• SEMI E-39 - Object Services 
• SEMI E-30 - GEM​​​​​​
• SEMI E4 - SECS-I (serial protocol)
• SEMI E37.1 - HSMS-SS (ethernet protocol)
• SEMI E5 - SECS-II (message format)

Main features : 

• A complete sorter software for 200mm or 300mm sorters
• Hardware options: 1 to 4 Load ports, 1 robot, 1 to 2 aligners, 1 to 2 Wafer ID Readers (Cognex), E-84 through dedicated boards
• Need to be customized according to the OEM hardware interface and specific features
• Can be rebranded with the OEM logo
• Based on A²ECF SEMI

Features:

• Receive and Send any SECS-II compliant message (including E40, E94, E87,…)
• Create your own messages in SMN
• Use data to parameterize your messages
• Associate different sessions to different kind of tools
• Use transparently Serial or Ethernet communication
• Use several communication configuration
• Provide logs in SMN (E173) SEMI standard to your customers prior to tool shipment
• Log CEIDs with a meaningful name
• Emulate Host or Equipment with one software