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Amcoss GmbH

Leusbundtweg 49a
Feldkirch,  6800

Austria
http://www.amcoss-systems.com
  • Booth: C2301


Smart equipment for competitive single wafer processing

amcoss GmbH is a high-tech company. We design and build modular fully-automated & semi-automated single wafer spin processing equipment for coating, developing, lift-off, etching, cleaning, and tempering of wafers and substrates. Our machines, as well as our ams PILOT process control software, are configured  for complex, specialized applications and are absolutely customized for either flexible applications or high throughput.

We also offer a range of plug-and-play heat exchangers and chillers which replace different OEM temperature control units from Neslab, AMAT, LAM and other OEM equipment. In the expert field of optics & mechatronics amcoss designs, manufactures and repairs hiqh-quality optics & components for photolithography, RTP, CVD, EPI, coating, metrology and plasma.

More than 80% of all manufacturers of microchips and semiconductors worlwide, as well as well-known research and development organisations are amongst our customers. According to a rating of Dun & Bradstreet, amcoss is amongst the best 4% of all companies in Austria in matters of its financial rations (e.g. credit rating). Our business operations are highly efficient and productive.

In 2023 amcoss joined the Lab14 group of companies.


 Products

  • Fully automated single wafer equipment series amc
    With the amc series, amcoss offers fully automated single wafer processing equipment for coating, developing, lift-off, etching, cleaning, heating/cooling and lift-off of wafers and other substrates....

  • Customised tools

    All amc models are adaptable platforms, so custom configurations and process solutions are standard across the amc range. However, the footprints are very compact and space saving. For example, with the amc 1000 you will find 3 processes, 1 wafer handling station and up to 4 I/O stations on approximately 1.4 m² and you can flexibly process wafer sizes between 2" and 8".

    Each amc tool can be optimised for either flexible single processes or high throughput. Choosing the right production equipment to increase efficiency in a number of ways is an important aspect of the sustainability of a company and its products.

    Process, cost and machine efficiency

    Almost all features of the amc tools, e.g. linear motor drive for nozzle positioning or our special EBR solutions, are configured to enable and optimise flexible processes. In addition, the ams PILOT software independently controls the processes in each machine, contributing greatly to this. This increases throughput and the quality of the finished product, reduces scrap, cuts downtime and prevention costs and saves time.

    Optimised processes, attractive acquisition costs, a very good return on investment, low maintenance and spare parts costs and the long service life of all components contribute to increased cost efficiency. In addition, flexible process options and the wide range of substrates that can be processed help to increase machine efficiency and reduce changeover times. Furthermore, the compact footprint of the amc systems and the option of true through-the-wall installation save expensive clean room capacity.

    Environmental protection is becoming increasingly important in all areas of life, and it is also a matter of great concern to amcoss, which is reflected in our equipment. Thanks to the energy saving mode of our ams PILOT software and the unique amcoss dispensing system, the option to reuse media and recycle dissolved metals in the lift-off process, as well as other clever features, not only resists and media can be saved, but also energy. As a result, there is less scrap and waste. Because several processes can be run in one compact machine, the environmental footprint is generally smaller. Finally, we try to keep our supply chain as local as possible.

    Sustainability must not be limited to technology, but must also focus on people. Production equipment must be simple, convenient and safe to operate. Our unique amc operating concept is reflected in all aspects of our amcross machines - in our user-friendly ams PILOT software, in a machine design that allows easy access to modules that can be easily installed or removed, and in easy process adjustment. In addition, many built-in features enhance operator safety.

  • Semi-automated amr single wafer equipment series
    Our semi-automatic amr series for coating, developing, cleaning, lift-off, vapour priming, etching and heating of single substrates has been designed to meet the needs of single and small batch production....

  • Laboratories, research institutes, development departments and prototype manufacturers benefit from our extremely compact processing units, which take up little space and are very cost effective. All of the proven amcross processing modules and technologies are included in our amr tools and are as reliable, precise, efficient and economical as our fully automated tools. The only feature missing is automatic wafer handling.

    Flexible combinations

    One or more processing units (600 x 600 mm) with one processing module each are flexibly combined with a control unit (450 x 600 mm or 200 x 600 mm) equipped with our ams PILOT control software. The result is an individually configured, compact tool that can be expanded as required. Depending on the substrate size to be processed, you can choose between two different models of processing modules:

    amr 200 - for wafer types from 2" to 200 mm diameter and small pieces

    amr 300 - for wafer types from 2" to 300 mm diameter and small pieces


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