The design of the inspection stage is inspired by the results of in-house developed topology optimization software. Hence, the stage is well-balanced in terms of mass and stiffness. The integrated design has inherent advantages over conventionally stacked systems: dynamic performance is increased and Abbe errors are reduced.
The first linear gantry axis is built on a granite structure, to provide a solid and accurate base. The second linear axis that moves perpendicularly to the first one is not stacked but integrated into the gantry axis. This makes sure that the stage adheres to the philosophy in which all bearings, centers of gravity, and motors are aligned in a single plane.
Finally, the 2Z-Theta module for the inspection stage is placed inside the gantry, making the design incredibly compact and bringing all drive dynamics into one plane. Reducing the arm of the moving masses increase the observable stiffness and hence system performance benefits.
For more information visit the online product page https://www.pm.nl/en/products/motion-systems-positioning-systems/wafer-inspection-stage