Process Technology

LUFRAN by Process Technology - A complete turn-key system! Industry leading heating solution is an ultra-pure, ultra-reliable high purity water heater! Utilizing PTFE and PVDF wetted surfaces, the LUFRAN DI Series is the preferred and industry-leading heating solution for highly-critical semiconductor and flat panel display manufacturing processes. Featuring an advanced temperature control system and sizes up to 312kW, this is the ultimate in ultra-pure deionized water heating. Offers exceptional MTBF of ten years! Thousands of installations worldwide. Worldwide field service support. 99% energy efficient! Heats up to 194°F (90°C).

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The TIH Chemical Heater by Process Technology offers exceptional performance and reliability, capable of heating a wide range of chemicals and acids. Ideal for both single-pass and recirculating applications, it delivers best-in-class performance across various flow and temperature requirements. Known for its durability and long-lasting operation, the TIH is the most robust inline chemical heater available. Multiple plumbing layouts ensure easy installation into diverse tool configurations, while fluoropolymer (PTFE) surfaces provide protection against permeation.

The SHX Inline Heater by Process Technology is engineered for the safe heating of isopropyl alcohol (IPA) and meets the highest cleanliness standards for next-gen semiconductor technologies. Featuring high-purity PTFE components to prevent metal contact, it supports both recirculating and single-pass flow, making it ideal for high-purity solvent heating. The SHX heater is perfect for semiconductor wafer cleaning, flammable solvent heating, and heating acids or corrosive chemicals. Custom configurations and explosion-proof designs (SHX-EX) are available. It heats up to 194°F (90°C), ensuring reliable and efficient performance.

The CHEMX Inline Heater by Process Technology offers superior heating for wet-process chemistries, meeting advanced Ultra-High-Purity (UHP) standards. Featuring a PTFE flow path with fluoropolymer wetted materials and an o-ringless sealing design, it ensures reliability and safety. Capable of detecting fluid path breaches, CHEMX is ideal for non-flammable chemistries in both single-pass and recirculating applications. Designed for fast heat-up and easy integration, its compact form fits seamlessly into various setups, promoting efficient and clean operations. Each unit is cleanroom assembled to uphold the highest purity standards.

The Frontier Inline Heater by Process Technology is designed to heat chemicals and solvents in hazardous environments. Suitable for a wide range of flammable and non-flammable chemistries, it features electropolished stainless steel wetted materials for enhanced cleanliness. The heat source is isolated from the chemicals, ensuring safety and reliability. Certified to UL823 and ATEX standards, it is ideal for Class I, Div 2, and Zone 1 & 2 hazardous environments. With power options up to 36kW, the Frontier is the most powerful industrial solvent heater available, offering exceptional performance across various flow and temperature needs.

The Pro Series power supply from Process Technology represents one of the most advanced power solutions in the metal finishing industry. Engineered with full programmability and modular construction, the Pro Series offers unmatched adaptability to support even the most complex applications, from high-precision electroplating in the semiconductor sector to specialized nitinol electropolishing for medical devices.

Designed to handle multiple configurations, the Pro Series features cells, channels within each cell, and variable output levels across channels. This level of customization supports applications such as multiple cathodes, segmented anodes, and multi-bath plating, enabling seamless alignment with specialized process requirements. With pulse capabilities, air-cooled XR design, and an impressive range of 0.001–50 amps and 1–350 volts, the Pro Series provides comprehensive power management for the industry’s most demanding needs.