The COMPACT sorter is our mainstream product for 300mm silicon wafer handling. Available in 2 and 4 Load Ports model, its innovative design offers a seamless integration because of its field proven modules and peerless footprint (*barely 1m² or 12ft²)
Its vacuum free handling technology ensures an optimized cleanliness (down to 2nm node); while the embedded notch aligner & Optical Character Recognition allow smooth operations with a high throughput.
*See layouts in datasheet available at booth for more details