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Evatec AG

Hauptstrasse 1a
Trübbach,  CH-9477

Switzerland
http://www.evatecnet.com
  • Booth: C1730


Welcome to Evatec - The Thin Film Powerhouse

Home of the BAK and CLUSTERLINE® families, Evatec delivers complete thin film production solutions for Advanced Packaging, Semiconductor, Optoelectronics and Photonics. We offer a range of batch, cluster and inline deposition systems according to customer throughput, process requirements and fab integration requirements. Evatec's Advanced Process Control (APC) technologies set new standards in process control through "in situ" capability for control of mechanical, optical and electrical properties during the deposition cycle. Use our "in situ" techniques to reduce your process development times, enhance your yields or increase tool throughput. 

 Press Releases

  • In addition to showcasing our latest innovations, we are thrilled to highlight our new PEALD (Plasma Enhanced Atomic Layer Deposition) capability. The high density microwave plasma source technology in our latest ALD module allows for low temperature processing and prevents unwanted ion bombardment, making it ideal for working with damage sensitive substrates and materials.

    Curious to learn more? Come by our booth and discover how our cutting-edge technology can benefit your operations. We look forward to discussing how our advanced thin film and exploring new opportunities together.

 Products

  • BAK Family
    With over 2000 systems installed around the world, find out why the BAK is the industry standard evaporator across semiconductor, optoelectronics and photonics....

    • With new levels of flexibility, and new levels of process control the BAK Evaporator is the industry leader in selected applications across Power Device, Wireless, LED, MEMS and Photonics applications. There is a BAK thats suitable for everyone - from the compact BAK 501 for universities and research institutions to the BAV 2000, a production giant. 

    Visit our website to learn more: https://evatecnet.com/products/bak-family/

  • CLUSTERLINE® Family
    Benefit from the CLUSTERLINE® reputation of secure and precision processing on a range of platform sizes up to 650mm in applications across all Evatec core markets....

    • CLUSTERLINE® are a family of platforms named according to their substrate size capability. All platforms share cluster architecture with cassette-to-cassette processing and fully automated handling. Production solutions on CLUSTERLINE® cross all 6 Evatec core markets.

    Whatever your application, our specialists can help you configure an ideal CLUSTERLINE® platform for you. We deliver complete process solutions including highly aligned magnetic films, high performance piezoelectrics like AlScN for broadband RF filters and highly efficient energy harvesting devices, high aspect ratio TSV metallization in Advanced Packaging or precise deposition of TCOs and multilayer dielectrics for the latest micro LED and 3D filter technologies.

    Read more about our CLUSTERLINE® 200, 200 BPM, 300, or 600 on our website: https://evatecnet.com/products/clusterline-family/

  • HEXAGON
    Process 300 or 200 mm substrates with highest throughput achieving lowest Rc in the industry. HEXAGON is the production platform that puts you ahead in UBM, RDL and Fanout....

    • HEXAGON is a dedicated wafer level packaging platform for volume production in applications like FOWLP at the lowest cost of ownership offering atmospheric pressure degas, etch and metal deposition.

    • Processing of highly outgassing organic passivated wafers
    • Atmospheric frontend handling with a high-performance dual end effector robot for the shortest wafer swap times
    • Wafer transfer by synchronous indexer enables high speed wafer processing
    • Etch shield kit lifetimes of > 20000 wafers with enhanced uptime and reduced maintenance
    • Footprint less than 11 square metres (without control racks)
    • System design for lowest Rc in the industry and best wafer to wafer repeatability

    Learn more about the HEXAGON on our website: https://evatecnet.com/products/hexagon/

  • SOLARIS® Family
    From Touch Panels to EMI Shielding, Power Devices to Photovoltaics, SOLARIS® platforms are designet for "fully automated fabs". Choose from the S151 configured for substrates up to 8 inch diagonal or the S380 for substrates up to 15 inch diagonal....

    • SOLARIS® sputter platforms combine the know-how from delivering over 5000 high speed optical disk systems with experience gained from over 3000 semiconductor PVD tools to deliver a new approach in thin film mass production. With their "inline" architecture, SOLARIS® platforms are designed for "fully automated fabs" increasing throughput and eliminating manual handling. From Touch Panels to EMI Shielding, Thermoelectric Generators, Power Devices and Photovoltaics, the S151 and S380 platforms offer flexible high speed manufacturing solutions for rigid and flexible substrates.

    Visit our website for more information: https://evatecnet.com/products/solaris-family/

Categories

205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 206 PV Equipment
  • Thin Film
    • 207 Process Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
    • 400 Components, Parts & Accessories
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants
    • 401 Sub-systems
  • Plasma Sources; Controls; Monitoring; Diagnosis

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