piezosystem jena GmbH

The systems of the MIPOS 800 SG series offer a nano-positioning and scanning range up to 800 µm in open-loop operation, and 650 µm in closed-loop. 

Unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 800 SG can be guaranteed by the use of the integrated measurement system. The design which includes an integrated preload of the actuator offers high resonant frequency and highly parallel motion.

Due to the unique features of the MIPOS 800 series, fast scanning applications can be accurately realized with the shortest settling times.

Piezo amplifiers/controllers are designed for high precision positioning of low-voltage piezo actuators. These amplifiers are tuned for extremely high output stability and extremely low signal noise at the output. A low amplifier signal-to-noise ratio is very important because it determines the total resolution of the actuator. The nearly unlimited resolution of piezo-electric actuators using these amplifiers results in ultra-precise movement.

Depending on the configuration, controllers can be equipped with a sensor servo module for controlling actuators with an integrated positioning feedback sensor. All systems can be operated manually or via a digital interface, with the exception of a few OEM controllers. All amplifiers can be controlled by an analog signal if desired.

The new NV 200/D controller is built to deliver powerful high-resolution signals offering a wide variety of control options including ethernet and USB – C. With 400 mA of peak current, the system can provide high frequencies and fast response times, while still maintaining 16 bit resolution and less than 0.7 mV of noise.

The NV 200/D comes with an integrated closed loop control, as well as Iterative Learning Control for closed loop precision at open loop speeds.

Features of NV 200/D Compact Controller:

• Ethernet connection for remote control
• PiSoWorks software for complete piezo control
• USB-C interface
• Real time SPI interface
• Analog interface
• Trigger I/O
• 400 mA peak current
• Automatic Sensor Calibration (ASC function)
• 16 bit resolution
• Feedback control with adjustable PID or ILC control
• Low-pass filter and slew rate limiter
• Arbitrary waveform generator
• Data recorder

The PSH 25 serves fast and precise positioning of optical components such as mirrors and prisms. The piezo stages can be equipped with a strain gauge positioning sensor.

The PSH 10/2 system offers ± tilting up to 16 mrad optical, and microsecond rise time.

The PKS 1 was designed for flexible laser beam stabilization which can easily be integrated into the beam line.

Stage Characteristics:

• Tilting to 20 mrad
• Sub-µrad resolution
• Some varieties are ideal for dynamic applications
• Systems for multiple mirror sizes
• Strain gauge measurement models available

The PZ 250 CAP WL was developed for the precise positioning of semiconductor wafers with diameters up to 12”. In closed-loop operation the actuator offers motion in Z direction of 250 μm. Equipped with a capacitive sensor that overcomes hysteresis and drift, single steps in nanometers can be achieved. Specified positions can be held with high stability for a long periods.

Due to its high stiffness, the PZ 250 CAP WL can carry loads up to 3 kg.

The PZ 250 CAP WL is well suited for applications in the semiconductor industry, solar panel production, lithography, and mask inspection.

The capability to move loads up to 20 kg make the TRITOR 320 one of the most robust piezo driven 3D positioning stages available on the market. The stage can be equipped with an integrated feedback sensors for closed-loop control. The unique design of the flexure-hinges allow for excellent usability with zero friction.

High stiffness, in combination with excellent straightness of motion, makes the TRITOR 320 ideal for high precision positioning in the nanometer range of heavy objects such as wafer chucks, bonding tools, and pick & place platforms.

Piezoelectrical actuators can act much faster, and with a higher accuracy to a signal change, than any motorized drive available. The resolutions of piezoelectrical actuators are only limited by the signal noise of the control system. Therefore, these piezo solutions are an excellent choice for positioning applications in fiber alignment, optics, wafer handling, medical equipment, etc. Each axis can be controlled separately in closed loop mode. An integrated sensor system is an available option that guarantees accuracy in the nanometer range.Dynamic scan applications are a typical utilization of TRITOR stages. The simultaneous motion, available in X, Y and Z directions, offers a large degree of freedom. All stages of the TRITOR series can be made with special materials for unique vacuum or cryogenic applications.