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VON ARDENNE GmbH

Am Hahnweg 8
Dresden,  D-01328

Germany
http://www.vonardenne.com
  • Booth: C2453


VON ARDENNE - Vacuum coating equipment for functional layers

With more than 60 years of experience in electron beam processes and 45 years in magnetron technology, VON ARDENNE is one of the leading providers of equipment and technologies in PVD thin-film technology and vacuum process technology.

Besides the large-area PVD coating systems for glass and photovoltaics applications, VON ARDENNE offers inline or cluster platforms for microelectronics, sensors, optoelectronics, advanced packaging, power devices and photonics.

These platforms are modular and can be configured according the desired productivity, special requirements, different coating technologies, pre- and/ or post-treatment. They may also be combined with automation solutions for the substrate handling into and out of the system.

With this modularity, a wide range of applications from R&D to testing and pilot- production up to highly-volume mass production can be covered. What is especially interesting is the upgradability of the equipment, the fact that machines can “grow” along with the needs of our customers and our flexibility to adapt our equipment for new special applications.

With our network of subsidiaries, you can rely on a high-quality service and a strong technology support provided worldwide.


 Products

  • HISS - Horizontal Coating System
    Highly Flexible & Scalable Inline Systems for Horizontal Substrate Transport...

  • The HISS is a modular coating system for the horizontal coating of substrates. It is the perfect choice if you are looking for highly flexible production equipment with a small or medium throughput equipped with proven technology. Thanks to its modular design, the HISS can be configured according to your needs.

    We offer various basic configurations of the system such as the single-ended version for a smaller production scale. The system offers a high process flexibility for sputter processes and thermal evaporation. The flexible and dynamic design of the system with standardized modules enables custom-made configurations. That means that the system can be adapted to new processes or requirements. Therefore, our customers are able to act very dynamically and can adapt to the evolution of their product.

  • Cluster Systems
    Versatile cluster systems for research, development, pilot and volume production with a modular design...

  • Cluster systems are based on a platform with many modular units. Therefore, you can configure each coater according to your specific applications. On top of that, special features can be integrated to meet your demands. Thanks to this flexibility, VON ARDENNE cluster systems will help you reduce your cost of ownership.

    VON ARDENNE cluster systems are so versatile that they meet the technological requirements of research and development facilities but are also suitable for mass production. This is especially true for the development of new coating technologies and the creation of layers with specific properties and a high reproducibility.

    The systems can be configured individually for different tasks: up to seven process chambers and one or more load locks can be installed around the central transfer chamber. All chambers are separated from each other, both vacuum wise and with regards to their control technology.


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