VON ARDENNE GmbH

The HISS is a modular coating system for the horizontal coating of substrates. It is the perfect choice if you are looking for highly flexible production equipment with a small or medium throughput equipped with proven technology. Thanks to its modular design, the HISS can be configured according to your needs.

We offer various basic configurations of the system such as the single-ended version for a smaller production scale. The system offers a high process flexibility for sputter processes and thermal evaporation. The flexible and dynamic design of the system with standardized modules enables custom-made configurations. That means that the system can be adapted to new processes or requirements. Therefore, our customers are able to act very dynamically and can adapt to the evolution of their product.

Cluster systems are based on a platform with many modular units. Therefore, you can configure each coater according to your specific applications. On top of that, special features can be integrated to meet your demands. Thanks to this flexibility, VON ARDENNE cluster systems will help you reduce your cost of ownership.

VON ARDENNE cluster systems are so versatile that they meet the technological requirements of research and development facilities but are also suitable for mass production. This is especially true for the development of new coating technologies and the creation of layers with specific properties and a high reproducibility.

The systems can be configured individually for different tasks: up to seven process chambers and one or more load locks can be installed around the central transfer chamber. All chambers are separated from each other, both vacuum wise and with regards to their control technology.