In the semiconductor field, with the miniaturization and sophistication of electronic devices such as personal computers, tablets, and smartphones, there is a demand for smaller, higher-quality semiconductor devices. Naturally, the circuits that determine the performance of devices are becoming more miniaturized, so particles (foreign objects) at the level of “several nanometers,” which were not considered a problem in the past, have become a major problem in recent years.
Here, I would like to introduce three of our original particle countermeasures.
1. Particle Collector
The “Particle Collector” proposed by Creative Technology is a tool that captures particles (foreign objects) in space and specializes in particle countermeasures by applying the “Electrostatic Chuck” technology that we have cultivated over many years in the semiconductor field. You can install it on the load port, load lock, transfer chamber, exposure system, and other components to reduce equipment downtime and increase productivity.
More information: https://creative-technology.co.jp/products-e/particle-collector/
2. IonPad
The "IonPad" is a tool composed of a special resin coating and a base material, designed to generate Van der Waals forces (intermolecular forces) at the interface between the IonPad and the wafer. When installed on transfer arms, our IonPad enhances the accuracy of handling not only flat wafers but also warped wafers. Moreover, by gripping the wafer with minimum contact on the backside, it also helps reduce particle contamination caused by contact with the transfer arm, serving as an effective particle countermeasure.
More information: https://creative-technology.co.jp/products-e/ionpad/
3. eRaser Disk
The presence of particles on the pin chuck or electrostatic chuck, which is the processing stage, can cause process errors and equipment shutdowns. In general, particles are removed by in-line cleaning (dummy run) using a dummy wafer, but for particles that cannot be removed even with a dummy run, the equipment is stopped, and manual cleaning work is performed. However, the reality is that it takes a lot of time to recover the equipment. To overcome this situation, we have developed the "eRaser Disk" as an in-line stage cleaning tool for semiconductor manufacturing equipment. By coating the silicon wafer with a special resin, the particle removal performance is improved, contributing to the reduction of dummy run time and the frequency of equipment shutdowns.
More information: https://creative-technology.co.jp/products-e/eraser-disk/