Loading...

Ebara Precision Machinery Europe GmbH

Mühlweg 2C
Sauerlach,  82054

Germany
http://www.ebara-pm.eu
  • Booth: C1219


Discover our latest innovations for sustainability!

EBARA is a leading global manufacturer of vacuum and semiconductor systems used especially in the semiconductor industry for manufacturing wafers, liquid crystals, solar cells and other products requiring advanced technology. For complex industry requirements e.g. vacuum and gas abatement, EBARA offers integrated solutions. EBARA Precision Machinery Europe GmbH (EPME) is part of the EBARA Group, Japan, and employs over 240 people in Europe and Israel. The portfolio includes dry and turbo molecular vacuum pumps as well as gas abatement systems. In addition, EPME sells state-of-the-art CMP tools, wafer bevel polishing and substrate plating systems. In Europe, EPME has a central warehouse and two overhaul centres for vacuum pumps. EBARA is No 1 on the world markets for Bevel Polishing Systems and global leader for vacuum pumps and CMP tools. 80% of the top 20 of semiconductor manufacturers are EBARA customers. Worldwide the semiconductor industry counts on EBARA solutions. Our mission is to support the globe. That meas innnovative technology meets sustainability. 

Contact: [email protected]

 Press Releases

  • At Semicon Europe in Munich, EBARA is presenting the new “EV-X” series of vacuum pumps to the trade public for the first time in Europe. This pioneering product series represents a significant advance in energy efficiency and promises cost savings in the double-digit percentage range. The EV-X series is the result of years of research and development and offers technology specifically designed to save energy and increase efficiency. The EBARA Group, headquartered in Tokyo (Japan), has committed itself to the primary corporate goal of making a significant contribution to global environmental and climate protection with sustainable and resource-saving product developments. This has been achieved with this new product series. Further advantages have been realised for customers in terms of space requirements and ease of maintenance.

 Products

  • EV-X series
    The EV-X series is the result to save energy and increase efficiency for climate protection....

    • Reduction in energy costs: The EV-X vacuum pump saves over 30% in energy costs compared to standard vacuum pumps from competitors. The savings are between 10 and 38%, depending on the model. The maximum gas volume at a nominal speed of 10,000 l/min is 80 slm for the EV-X100N exhibited at Semicon Europe.
    • Variety of applications: The EV-X series is available in four product classes: 30 / 100 / 200 / 300 with a maximum pump speed of 3,000 / 10,000 / 20,000 or 30,000 l/min. With the higher gas flow tolerance, the EV-X can be used in a variety of ways and is suitable for a wide range of requirements.
    • Space-saving: Thanks to the optimised design of the control function, the dimensions of the EV-X pump series have been adapted so that the customer can fit the vacuum pumps into the smallest of spaces.
    • User-friendly thanks to individual PCW control and a standardised control panel for all models.
    • Integrated heating solutions that can be used as required offer maximum efficiency thanks to their installation in the pump body and do not waste valuable energy in the sub-fab.

Categories

202 Other Equipment
  • Repair; Rework Equipment
  • Vacuum drying & out gassing Systems
    • 207 Process Equipment
  • Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
  • Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
  • Plating; Electro Chemical Plating; Deposition Systems
    • 307 Process Materials
  • CMP; Grind; Lap; Polish; Abrasive materials
    • 400 Components, Parts & Accessories
  • Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
    • 401 Sub-systems
  • Pumps, Vacuum
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers)
    • 701 Manufacturing Services or Consulting
  • Wafer Handling

    • Send Email

    Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".

    Loading ...

    :
    :


    Legend
    Available Timeslot
    Scheduled Appointment
    Personal Appointments
    Appointment Request
    Blocked Timeslot
    Restricted Timeslot
    Cancelled
    Declined