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Busch Vacuum Solutions

Schauinslandstraße 1
Maulburg,  Baden-Württemberg  79689

Germany
https://www.buschvacuum.com/de/de/
  • Booth: C1555


Innovative Vacuum Solutions for the Semiconductor Industry

Busch Vacuum Solutions is part of the Busch Group, one of the world’s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the group houses three well-known brands: Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions.

 Products

  • TORRI BD 0100
    Multi-stage rotary lobe vacuum pump...

    • Flexible

    Shortest pump-down time for load lock chambers

    Efficient

    Extremely low energy consumption, minimal maintenance, high uptime

    Compact

    Exceptionally small and light-weight

Categories

101 Photovoltaic Device Manufacturing
  • PV: Cells
    • 202 Other Equipment
  • Vacuum drying & out gassing Systems
    • 203 Inspection & Measurement Products
  • Leak Detection Systems - Vacuum or Gas
    • 206 PV Equipment
  • Cells
    • 400 Components, Parts & Accessories
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants

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