Advancements in industry and technology are constantly demanding new
solutions for the manufacturing of microchips regarding the technical, economic
and also ecological perspective. The Fraunhofer Institute for Photonic
Microsystems IPMS has established itself as a strong partner to industry with its
pioneering research and state-of-the-art equipment. The range of services
includes all steps “from lab to fab” - from consulting and process development
to pilot production.
While systems and components have to meet ever higher performance requirements, it
is also essential that they are compatible with further industrial processes in the
semiconductor industry and comply with the latest technology standards. Easy and fast
integration, a wide range of applications and cost efficiency are key parameters.
Fraunhofer IPMS is working on innovative solutions in the field of memory
technologies, sensors and actuators as well as MEMS systems. With its comprehensive
range of services and intensive cooperation with chip manufacturers, system
manufacturers and suppliers the institute enables the rapid transfer of results and
technologies.
New computing architectures and innovative storage for the next generation
of computers
We generate a growing amount of data every day. To deal with this, new technologies
are required that enable this information to be stored and processed quickly. With this
in mind, Fraunhofer IPMS is researching the next generation of computers. In projects
with international partners, such as “QSolid”, “Qu-Pilot” or “QUASAR”, the institute is
working on the production of qubits and the construction and architecture of quantum
computers. The research focuses on industry-oriented scalability of electronics,
optimized materials, processes and control technologies in regard to their CMOS
compatibility.
Non-volatile memory (NVM) solutions are becoming increasingly important for modern
data processing, as they are more powerful, cost-effective and energy-efficient.
Fraunhofer IPMS can look back on more than ten years of experience in the
development of MRAM, RRAM and ferroelectric technologies. Of particular note are
hafnium oxide-based ferroelectric memories, which can be seamlessly integrated into
advanced CMOS technologies, offering significantly better performance and lower
cost. Another promising energy-saving while high-performance technology is In-
Memory-Computing. Here, data is processed directly at the point of origin, i. e. in the
memory arrays.
The research services of Fraunhofer IPMS in this area include the development of
system designs, circuit designs and integration concepts, as well as material research
and characterization up to the megabyte range. With the implementation of materials
into production lines using wafer loops, a direct transfer into existing technology nodes
can be guaranteed.
Application-oriented MEMS, MOEMS and Microdisplays on 200-mm silicon
wafers
In two ultra-modern 200-mm clean rooms, Fraunhofer IPMS develops MEMS, MOEMS
and microdisplay technologies along the entire value chain: from individual processes
and technology modules to pilot production and support for technology transfer as
well as licensing. The institute thus covers the technological maturity levels from 3 to 7.
Start-ups, SMEs and companies without their own fabs benefit from low investment
costs thanks to the full-service offering. To make it easy for SMEs in particular to get
started, the institute also offers evaluation kits for all of its developments, which are
ready-to-use set-ups that customers can employ to test the Fraunhofer IPMS
technologies directly in their own application.
The institute further develops innovative components such as sensors, actuators and
microdisplays in their 200-mm-clean-rooms. The latter recently achieved a new world
record of 45% transparency. The microdisplays are ideal for virtual reality, augmented
reality and mixed reality applications in industrial production or medical technology due
to their very high resolution and technological level.
Close links with the semiconductor industry
To accelerate the transition from laboratory to practical application, Fraunhofer IPMS
offers a strong network and close cooperation with industry. At the same time, this
promotes Germany's technological competitiveness. The institute recently celebrated
10 years of collaboration with BASF in the field of new materials for microchips.
GlobalFoundries has also been a close partner in process development for many years,
just like Bosch. The long-standing partnership with Bosch focuses on the development
of MEMS technology, for example in the development of micro loudspeakers.
Furthermore, the institute operates a metrology center with Applied Materials. In the
Screening Fab at the Center Nanoelectronic Technologies (CNT), materials, processes
and machines can be evaluated under industrial conditions, in accordance with the ISO
9001 standard and at ultra-large-scale integration level (ULSI).
Customers, chip and equipment manufacturers, suppliers and other R&D partners also
have access to services on 200-mm and 300-mm wafers. The services range from
atomic layer deposition, chemical-mechanical polishing, wafer metallization and wafer
cleaning to metrology and nanopatterning.
Increasing importance of sustainability
Sustainable microelectronics is increasingly becoming the focus of modern
developments in order to address ecological challenges in the industry. By using
resource-saving materials and energy-efficient manufacturing processes, the carbon
footprint can be minimized. Fraunhofer IPMS is involved in a number of projects,
including the “Green ICT @ FMD” competence center of the Research Fab
Microelectronics Germany. The main aim is to find and evaluate alternative and more
environmentally friendly materials or processes and to significantly reduce energy and
material consumption during production. With this, future-proof microelectronics can
be developed, that meet the requirements of sustainability and at the same time
strengthen technological competitiveness.
Bundled expertise at Semicon Europa
Fraunhofer IPMS will be presenting its latest research results and technical possibilities
at “Semicon Europa” from November 12 to 15 in Munich. Visitors will have the
opportunity to get in touch with the researchers at the joint Silicon Saxony stand in Hall
C1 #419/33. Appointments can be made in advance via the Fraunhofer IPMS website: https://www.ipms.fraunhofer.de/de/events/2024/semicon_europe.html
At the stand, they can also talk to experts from Fraunhofer ENAS, Fraunhofer IZMASSID
and the Leibniz Institute for Innovative Microelectronics (IHP) - all of which are
part of the Research Fab Microelectronics Germany (FMD).