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Amcoss GmbH

Leusbundtweg 49a
Feldkirch,  6800

Austria
http://www.amcoss.com
  • Booth: C1229


Optics, (electro)mechanical components, chiller, fluid pumps

amcoss GmbH is a high-tech company. In the expert field of optics & mechatronics amcoss designs, manufactures and repairs hiqh-quality optics & components for photolithography, RTP, CVD, EPI, coating, metrology and plasma. We also offer a range of plug-and-play heat exchangers and chillers which replace different OEM temperature control units from Neslab, AMAT, LAM and other OEM equipment.

Furthermore, We design and build fully-automated & semi-automated single wafer spin processing equipment for coating, developing, lift-off, etching, cleaning, and tempering of wafers & substrates. Our machines, as well as our ams PILOT process control software, are configured for complex, specialized applications & are absolutely customized for either flexible applications or high throughput.

More than 80% of all manufacturers of microchips and semiconductors worlwide, as well as well-known research and development organisations are amongst our customers. According to a rating of Dun & Bradstreet, amcoss is amongst the best 4% of all companies in Austria in matters of its financial rations (e.g. credit rating). Our business operations are highly efficient and productive.

In 2023 amcoss joined the Lab14 group of companies.


 Products

  • Heat exchangers and Chillers amh series
    For heating & cooling during processes in microchip production in AMAT, Neslab, LAM, TEL, Mattson & other equipment, amcoss offers amh heat exchangers for temperatures ranging from 30 – 95 °C & amh chillers for temperatures between 0 °C and 60 °C....

  • Individual solutions for process heating and cooling

    amcoss temperature control units replace conventional, expensive, or even no longer available Heat Exchangers and Chillers as e.g. AMAT 0 & 1, Neslab Steelhead and Endura, LAM TCU, Beta Tech, as well as HX150/HX300 and other. We prepare and fit them according to our customers´ demands. Thanks to compatible, proprietary interfaces, which we at amcoss configure and install (replacing standard interfaces) our devices are immediately ready for „Plug-and-Play“ operation at our customer´s equipment. This means our customers will receive personalized devices adjusted to their own process requirements and do not have to find and realize solutions on their own. This again simplifies their sourcing processes and increases cost-effectiveness.

    Price-performance ratio of amcoss devices is excellent, and they are even more economic than OEM chillers. So, time and money can be saved.

  • Dispense system for photoresists: amd 030
    High-precision, durable photoresist pump – easy to integrate, OEM-approved, long-lasting performance....

  • amcoss offers an advanced, highly accurate pump system amd 030 specifically designed for the precise dispensing of a wide range of photoresists. This system has been approved by global OEMs. Built for efficiency and durability, the pump system delivers consistent performance and precise results, even after thousands of dispensing cycles. Its robust construction and cutting-edge technology make it a reliable choice for demanding applications, guaranteeing long-term accuracy and effectiveness.

    Your benefit:

    Approved and qualified: mature system in use with a great variety of resistsSuperior precision: 30 ml dispense volume, adjustable to <0.01 ml
    Wide range of recipes: 0.1 – 7 ml dispense/sec, programmable controller
    Superior handling: reduced tool downtime with a plug-and-play solution from amcoss, including controller
    Compatibility: compatible with any filters and ports (Flare, Pillar, etc.)
    Integrability: can be integrated into new tools or retrofitted into existing ones
    Technical competency: over 50 pumps handled annually by amcoss, with all spare parts available for refurbishment or repair
    Quality control: all pumps are extensively tested for a minimum of 3.000 cycles, with a tolerance of 0.1 ml
    Warranty: 1-year warranty provided by amcoss, with installation supportavailable upon request

    amcoss also offers offers refurbishment of your defective Wafertec dispense system (models F30, F32, F1 and S30) in a manner that afterwards it will work as precise and reliable as a new pump.


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