Agileo Automation

11 rue Victor GRIGNARD
POITIERS,  F-86000

France
http://www.agileo.com
  • Booth: C2848


Control & Connectivity for Equipment Manufacturers SECS/GEM

Agileo Automation provides control and connectivity solutions for semiconductor equipment manufacturers

Our customers are mainly Original Equipment Manufacturers of production machines that equip the factories of semiconductor and precision electronics companies worldwide. We provide SECS/GEM and GEM300 licensed libraries, internal equipment control libraries and cost-competitive integration services to a global installed base.

Experts in the semiconductor industry, Agileo Automation supports our customers from the design and internal control of their machines to connection to the IT systems for production control in factories all over the world.

We develop software modules that are integrated by our teams and/or those of our customers on production machines.

Agileo understands the issues faced by semiconductor equipment manufacturers and instills this mindset throughout the company by:

- Understanding the purpose of the machine and its hardware architecture
- Working with end customers (Tool owner and IT team)
- Bringing the machine into production within the agreed deadlines
- Prioritizing the support of software and technicians in the field


 Press Releases

  • FOR IMMEDIATE RELEASE

    Media contact

    Muriel Guilbert

    [email protected]

    Agileo Automation Launches The E84 PIO Box For The Enhanced Compliance Testing

    Of Semiconductor Equipment With SEMI Standards

    Innovative plug-and-play device helps conduct comprehensive equipment compliance tests for automatic carrier delivery in automated fabs

    SEMICON Europa, Munich, Germany, November 12, 2024 – Agileo Automation, a leading provider of control and connectivity solutions for global semiconductor equipment manufacturers, today launches the E84 PIO Box at Booth #C2848. This handheld device offers a new lightweight interface for fab staff to test semiconductor equipment software for compliance with SEMI’s E84 and GEM300 standards suite for automatic carrier delivery. It improves the readability, identification, and validation of E84 signal exchanges and functional aspects in cleanrooms or workshops. Integrated with Agileo Automation’s Speech Scenario software that emulates the fab host and validates the SECS/GEM interface with predefined test scenarios, the E84 PIO Box can easily emulate automated carrier delivery systems such as overhead hoist transport or automated guided vehicles. It is able to detect non-compliance and other functional issues thanks to its close alignment with SEMI’s E84 standard. The device features a DB25 connector for easy integration with E84 passive systems such as a load port and connects directly to a PC via a single USB cable for both data and power supply.

    “In highly automated fabs, even minor carrier delivery issues can lead to costly downtime. Our E84 PIO Box is designed to rigorously validate nominal and error cases, ensuring seamless operations and fast recovery, benefiting both equipment manufacturers and facilities alike,” explains Marc Engel, CEO of Agileo Automation. “Early adopters have seen significant improvements in overall equipment software quality and now approach each software update with greater confidence, backed by consistent testing results.”

    - ends -

    About Agileo Automation

    Since its inception in 2010 in Poitiers, France, Agileo Automation has empowered global semiconductor equipment manufacturers to optimize their production machines with control, communication, data acquisition, and testing solutions, enabling their deployment in large-scale fabs worldwide. At the heart of Industry 4.0, Agileo’s A²ECF-SEMI framework provides a robust foundation for developing equipment controller software, leveraging the SEMI SECS/GEM and GEM300 standard suites. As a member of SEMI and the OPC Foundation, Agileo is a key contributor to the development and integration of industry standards such as SEMI standards and OPC Unified Architecture (OPC-UA). For more information, please visit our web site or follow us on LinkedIn.


 Products

  • A²ECF SEMI
    Robotic Control, Scheduling and Connectivity for Semiconductor Tools An operating system for your equipment automation with SEMI standards compliance. ...

  • A²ECF Semi is a software framework for process or metrology equipment control including EFEM (robotics loading platform) management.

    A²ECF Semi is intended for equipment manufacturers in the semiconductor, electronics or photovoltaic industries.

    Higly customizable, this SEMI E95 compliant framework proposes a standardized way to present user interface for semiconductor applications:

    • Multiuser management with access rights (operator, process engineer, field service engineer for example)
    • Automatic trace generation with tools to analyze equipment activity
    • Operator actions recording
    • EFEM devices management such as (contact us for list of supported devices):
      • Wafer handlers with one or dual arms
      • Pre-aligners
      • Load Ports and FOUP Openers
      • Scribe readers
    • Schedulers for wafer flow sequencing
    • Data collection to the Fab Host and Remote control through SECS/GEM and PV2 interface library Agil'GEM or GEM300 (GEM + 300mm automation standards including in particular Carrier Management, Process Job, Control Job and Substrate Tracking through the integration of Agil'GEM300)

    Integration:

    A²ECF SEMI can be integrated either by your team after training, or by Agileo Automation team, or both.

    Most of the time when we take care of the development, we create the first application based on the basis of specifications that we can write together during a consulting phase. In this case, we are able to commit to a budget and a timeframe up to the tool acceptance at your customer's site, including SECS/GEM connectivity. Developments are carried out using our methodology in order to ensure the expected quality and meet deadlines.

  • AGIL’GEM
    SECS/GEM DRIVER encapsulating SEMI standards required to establish communication with Host/MES/EAP...

  • Agil'GEM is a SECS/GEM and PV2 Software library for semiconductor, electronics and photovoltaic production equipment connectivity.

    GEM services:

    •     Equipment communication state and control state
    •     Process program
    •     Collection event sending
    •     Variable data collection
    •     Status data collection
    •     Remote control
    •     Alarm management
    •     Equipment constants
    •     Equipment Terminal Services
    •     Clock
    •     Trace data collection
    •     Limits monitoring

    SEMI standards:

    •     SEMI E4 SECS-I (serial protocol)
    •     SEMI E37.1 HSMS-SS (ethernet protocol)
    •     SEMI E5 SECS-II (message format)
    •     SEMI E30 GEM

    The Agil'GEM library can be integrated directly in Agileo Automation Equipment Controller Framework or in a third party Equipment Controller software through its COM/DCOM or .NET interfaces. The following languages can be used to integrate it C#, VB.Net, Pascal (Delphi), C++.

    Open sources integration samples can be provided with the SDK (Software Development Kit) for C#, VB.Net, Pascal and C++. Below, a screenshot of the the C# integration sample.

    An interface for PLCs is possible with the GEM4PLC architecture, which allows gateways with specific protocols such as Modbus or OPC-UA. The use of a third party OPC-DA server allows the implementation of gateways with almost all PLC brands on the market, including: Allen-Bradley, B&R, Beckhoff, CoDeSys, Fanuc, Hilscher, Honeywell, InTouch Client, Mitsubishi, Omron FINS, Siemens S5 and S7, Wago, Yaskawa, Yokogawa, etc.

    Integration support

    Beyond technical integration details, Agileo Automation helps its customers to understand GEM standard to adapt it to a given equipment thanks to a structured approach starting with a good understanding of the equipment

    Agil'GEM comes with a free manual version of Speech Scenario, our host simulator software for testing.

  • Agil’GEM300
    Solution for GEM300 connectivity Agil’GEM300 handles the complexity of GEM300 automation and provides a simple interface to connect to the devices, user interface and the factory host....

  • Agil'GEM300 is a complete .NET/C# solution for GEM300 connectivity. It handles the complexity of GEM300 automation and provides a simple interface to connect a semiconductor equipment controller application to the factory host.

    GEM300 services:

    • Management of Carriers and Load Ports
      • Carrier ID Verification
      • Slot Map Verification
      • Both manually and through OHT 
    • Management of Process Jobs
    • Management of Control Jobs 
    • Tracking substrates in the equipment with Substrate ID verification 
    • Tracking of Equipment Performance 
    • Management of Module Performance 
    • Collaboration between standards managed by Agil’GEM300 with minimal integrator interaction 
    • Includes Agil'GEM 

    SEMI standards :

    SEMI standards supported in Agil'GEM300:

    • SEMI E-87 - Carrier Management
      • Fixed buffer
      • Internal buffer 
    • SEMI E-40 - Processing Managment 
    • SEMI E-94 - Control Job Management 
      • Material redirection
    • SEMI E-90 - Substrate Tracking
      • Single substrate tracking 
      • Batch tracking 
    • SEMI E-116 - Equipment Performance Tracking
    • SEMI E-157 - Module Process Tracking 
    • SEMI E-39 - Object Services 
    • SEMI E-30 - GEM​​​​​​
    • SEMI E4 - SECS-I (serial protocol)
    • SEMI E37.1 - HSMS-SS (ethernet protocol)
    • SEMI E5 - SECS-II (message format)

  • Agil’ Sorter
    Full-feature software for Sorter tools...

  • Main features : 

    • A complete sorter software for 200mm or 300mm sorters
    • Hardware options: 1 to 4 Load ports, 1 robot, 1 to 2 aligners, 1 to 2 Wafer ID Readers (Cognex), E-84 through dedicated boards
    • Need to be customized according to the OEM hardware interface and specific features
    • Can be rebranded with the OEM logo
    • Based on A²ECF SEMI
  • Speech Scenario
    Speech Scenario emulates the Fab Host to validate tou CECS/GEM tool scenarios before shipping your equipment. SECS-II Host or Equipment simulator...

  • Features:

    • Receive and Send any SECS-II compliant message (including E40, E94, E87,…)
    • Create your own messages in SMN
    • Use data to parameterize your messages
    • Associate different sessions to different kind of tools
    • Use transparently Serial or Ethernet communication
    • Use several communication configuration
    • Provide logs in SMN (E173) SEMI standard to your customers prior to tool shipment
    • Log CEIDs with a meaningful name
    • Emulate Host or Equipment with one software


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