Higher production yields by fast & sensitive SIFT analysis.
Production of modern semiconductors at high yield requires ultra-high purity reagents, very low emission transportation and stringent air quality controls in the fab. Volatile or semi-volatile contaminants in the air can degrade semiconductor performance and/or greatly shorten expensive maintenance cycles or operational service of fabrication equipment. Conventional analytical methods have essential gaps in the required combination of high sensitivity, the wide range of chemicals used and the need for high time resolution. Syft's propriety technology SIFT-MS provides rapid, high-sensitivity analysis of air for the widest range of airborne molecular contaminants (AMCs) in the semiconductor and related industries, greatly reducing product loss and equipment failure and is the only solution that fulfills all these requirements in a single tool. Benefits include 24/7 operation with minimal downtime, real-time AMC monitoring for instant feedback on release events and simple integration with existing sample delivery infrastructure.