CE-MAT is dealing with cost-effective and innovative products for the semiconductor and solar industry. We offer customer specific solutions to your requirements in the areas spare parts, equipment and service.
Our program contains the following areas:
- Ceramic Spray Electrostatic Chucks and consumables for Single Wafer Plasma Etch
- Silicon Boat for atmospheric and LP-CVD processes
- Second source parts for ion implanter
- Quartz parts for furnaces and epitaxy
- CVD SiC dummy wafer
- Quartz glass raw materials
- Inspection tools: Visual, IR and PL