Micro System Integration Center, Tohoku University
We offer R&D support service for micro system technology.
Microsystem Integration Center (μSIC), Tohoku University, is a R&D organization for manufacturing and system integration centered on microsystem technology. It is also active in device design, development and test. We are collaboration widely with industry.
Open Collaboration(Hands-on-access fab): In a 1,800m2 clean room, we operate a wide range of semiconductor process / evaluation equipment for microfabrication technologies. Both 4 and 6 inch wafer process are possible. You can use the fab by yourselves under the technical staff’s support, and can access accumulated know-how at Tohoku University. More than 270 companies have utilized the fab. Some of them have already been commercialized by fully or partly developed at the fab. Own processes as well as training can be done.
R&D: We promote joint research with companies that want to utilize the technological seeds of Tohoku University, or follow their own idea with our support. We cover a wide range of fields from basic MEMS development, up to system verification. There are many successful cases of commercialization through joint development in our center.