Institute of Scientific Instruments, Czech Academy of Sciences
Institute of Scientific instruments, Czech Academy of Sciences. is a non-university research institution focused on methodological research of techniques, methods and tools for analysis, imaging and quantification in applications covering material sciences, technology and living nature. The institute develops a number of unique technologies that serve both its own research and a number of applications in cooperation with partners from industry and academia. A number of measuring and imaging techniques find application in the semiconductor industry, whether it is electron microscopy or optical metrology tools for measuring and characterizing surfaces. Particularly relevant is the field of electron lithography suitable for the prototype production of semiconductor chips, which is dealt with at the ÚPT Group of Electron Lithography.