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Singulus Technologies AG

Hanauer Landstrasse 103
Kahl am Main,  D-63796

Germany
http://www.singulus.de
  • Booth: C1232

SINGULUS offers vacuum deposition systems (Cluster Tools)

SINGULUS TECHNOLOGIES - Thin-Film Coating and Surface Treatment

SINGULUS TECHNOLOGIES develops and assembles innovative machines and systems for efficient thin-film coating and surface treatment processes, which are used worldwide in the Photovoltaics, Semiconductor, Medical Technology, Packaging, Glass & Automotive as well as Battery & Hydrogen markets.

The company’s core competencies include various processes of coating technology (PVD sputtering, PECVD, evaporation), surface treatment as well as wet-chemical and thermal production processes.

SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment for magnetic sensors (TMR, GMR, AMR), integrated inductors, MRAM, µLED, Advanced Packaging (RDL/UBM), Interconnects, and other semiconductor applications.The cluster tools from SINGULUS TECHNOLOGIES with the brand name TIMARIS offer a complete portfolio of process modules for a variety of applications.

Categories

205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 206 PV Equipment
  • Cells
  • Thin Film
  • Wafers
    • 207 Process Equipment
  • Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
  • Coat; Develop; Resist Processing; Track Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
  • Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE)
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Ion Implantation Equipment
  • Ion; E-Beam Milling Etching Equipment
  • Plating; Electro Chemical Plating; Deposition Systems
  • Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
    • 901 Printed, Organic, Flexible and Large Area
  • Equipment: Vacuum deposition

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