Pfeiffer Vacuum GmbH

Berliner Strasse 43
Asslar,  Hesse  D-35614

Germany
http://www.pfeiffer-vacuum.com
  • Booth: C1555


The ultimate product range for total fab solutions!

Vacuum technology is needed in the manufacture of countless products of our daily life and enables future technologies. You develop the megatrends of our future. We supply these growth markets with the matching solutions by closely collaborating with you right from the development stage.

Since 1890, Pfeiffer Vacuum has shaped the vacuum industry with groundbreaking innovations. Every day, over 4,000 employees at 10 production sites and more than 23 sales and service companies worldwide give everything for you. With our comprehensive portfolio, we offer solutions for all types of vacuum applications. We are not only driven by highest quality standards. It is our vision to be the most sustainable and fastest growing market player in our industry to drive technology for a sustainable future. Thereby, your requirements are in the focus of our activities – today and tomorrow.


 Products

  • HiPace 3400 IT hybrid bearing turbopump
    For high performance ion implantation...

  • Take your semiconductor manufacturing to new heights with our HiPace 3400 IT, the most compact and powerful turbopump designed exclusively for your demanding ionimplantation applications.

    Compact with superior pump performance
    The HiPace 3400 IT sets the standard as the most compact turbopump in its class, ensuring optimal space utilization without compromising performance. The DN 320 flange size increases the pumping capacity for process gases up to an impressive 30 %.

    Process protection for extended uptime

    The unique bearing concept and specially coated rotor design protect both your process and the pump, providing unparalleled durability and reliability. Our proven pump design, coupled with an intelligent temperature management system, provides extended uptime and extended maintenance intervals. Keep your process running smoothly without unnecessary interruptions.

  • ASM 390/392 leak detector
    Mobile leak detectors optimized for rapid pump down and short response times on large test objects...

  • Superior performance, fast testing
    The ASM 390 and ASM 392 are the perfect leak detection solutions adapted to the semiconductor and display industries as well as to other demanding applications where rapid pump down and high sensitivity is key. Both models are fully
    Semi S2 compliant.
    These leak detectors are fitted with a dry frictionless backing pump and a powerful high vacuum pump, making them the ideal tools for leak testing of various components in clean environments. Equipped with an additional turbopump, the
    ASM 392 will speed up your leak detection process to reduce the downtime of your production equipment.

    Robust, accurate and reliable

    The ASM 390 and ASM 392 were developed to provide full confidence in leak testing regardless of the operator’s knowledge. They deliver premium performances and accurate results in a minimal time, making them highly efficient in the
    field.

    Ergonomic and highly maneuverable
    ASM 390 and ASM 392 share the same platform and are uniquely ergonomic with a convenient size and height, a secondary handle in the front, a fully rotatable, removable display, an inlet in the front for easy connection to test ports
    and unrivaled maneuverability for access to all testing areas, even in tight spaces.

    Smart and user-friendly
    Thanks to a wide, clear color touch display panel, an integrated toolbox with modular compartments and storage space for vacuum bellows, you will be amazed how easy leak detection can be when you have all necessary accessories at
    the point of use.
  • Electric Angle Valve: Series E
    Revolutionary angle valve with innovative power saving technology...

  • Electric actuation: Optimal control and durability
    The Series E valve line features an electric actuation system designed for total control and high performance. This system includes a fail-safe mechanism so the valve can return to the desired position upon loss of power. It also includes the ability
    to put the valve in “local mode”, enabling the user to manually operate the valve as needed when servicing their vacuum system.

    Energy efficiency and cost savings:
    Driving sustainability Series E is engineered for low power consumption, significantly reducing operational energy costs. This efficiency stems from its innovative motor-controlled electric actuation system, designed to consume far less energy than traditional pneumatic or hydraulic systems. By optimizing energy use, this angle valve not only lowers electricity expenses but also  reduces its environmental impact, supporting eco-friendly practices.

    Unmatched reliability
    In the world of vacuum technology, the reliability of angle valves is paramount, not only impacting operational efficiency but also offering a significant competitive advantage. Pfeiffer Vacuum’s Series E electric angle valves stand at the
    forefront of this field, meticulously engineered to meet the demanding requirements of vacuum applications ranging from atmosphere to 10-9 mbar. This innovative line of electric angle valves delivers unparalleled quality at competitive
    prices, becoming an essential tool for industries that demand precise vacuum control.
  • UltiDry multi-stage Roots pump
    Sustainable and robust process pump...

  • The UltiDry pumps are the latest innovation in sustainable technology, offering a range of advantages that will leave you amazed. 

    Designed to withstand the most challenging processes

    Engineered to enhance powder management, handle high inlet flows, withstand corrosive gases, prevent chemical reactions, and avoid condensation of byproducts, UltiDry ensures optimal performance and extends pump lifetime.


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