Pivotal Systems

48389 Fremont Blvd. #100
Fremont,  CA  94538

United States
http://www.pivotalsys.com
  • Booth: C2721


Welcome to Pivotal Systems' Booth!

Pivotal Systems provides the best-in-class technology for gas flow monitoring and control for the global semiconductor industry. The company’s proprietary hardware and software utilizes advanced machine learning to enable preventative diagnostic capability, resulting in an order of magnitude increase in fab productivity and capital efficiency for existing and future technology nodes.

The platform includes Pivotal’s Gas Flow Controller (GFC) product lines that offer high-accuracy, real-time monitoring, and control of the most critical parameters that are difficult to control in wafer processing today: Gas Flow and Chamber Condition.  Our product portfolio includes Flow Ratio Controllers (FRC), Positional Mass Flow Controllers (PFC), Pressure Controllers, Ultra High-Speed Valves, and thermal Mass Flow Controllers. 

Our Gas Flow Controllers (GFCs) and Flow Ratio Controllers (FRCs) meet our customers’ flow needs across industries and applications where precise, accurate, and controlled flow is required.  Our GFC line uses machine learning to provide maintenance and calibration free mass flow controllers during the devices' lifetime enabling fab productivity and environmental gas savings. 


 Press Releases

  • Introducing the GFC X and Flow Ratio Controller, setting new benchmarks in semiconductor manufacturing efficiency and precision.

    Fremont, California — August 30, 2024 — Pivotal Systems Corporation, a leading provider of innovative gas flow control (GFC) solutions to the semiconductor industry, is set to unveil two innovative products — the GFC X and the Flow Ratio Controller (FRC) — at the upcoming SEMICON Taiwan 2024, September 4-6. These new products represent a significant step forward in semiconductor manufacturing, offering unmatched precision, speed, and reliability.

    The GFC X, the latest generation in Pivotal's high-flow product line, features a pressure-based flow controller with a position control valve. This innovation allows for precise control, offering one of the industry's widest ranges of accuracy, making it ideal for various applications, including deposition processes.

    The GFC X paves the way for the future of gas flow control by offering an order of magnitude improvement on key flow metrics and enabling advanced wafer-manufacturing processes. In addition, the GFC X offers a range of accuracy from 5% to 100% of full scale, surpassing many competitors.

    “Our customers can rely on precise accuracy without the need for frequent calibrations,” said Joseph Monkowski, President and CTO of Pivotal Systems. “These innovations significantly boost fab productivity and capital efficiency, leveraging our cutting-edge solutions.”

    The FRC, first introduced during Semicon West in July, is designed to meet the industry's growing demand for faster and more responsive flow control. The FRC uses Pivotal’s proprietary control valve to improve wafer uniformity and wafer-to-wafer uniformity. It’s the industry’s fastest flow ratio controller, with a sub-second response time, enabling rapid adjustments to changing conditions, particularly in high-bandwidth memory and AI applications.

    Both products exemplify Pivotal's commitment to delivering superior performance, featuring zero drift, best-in-class accuracy, and real-time data availability. Pivotal’s competitive advantage lies in its drift-free performance, offering  ±0.5% of set point and repeatability of  ±0.2% of set point.

    Designed to minimize downtime and reduce the need for recalibration, the GFC X and FRC provide consistent, reliable results, significantly lowering the total cost of ownership for semiconductor manufacturers.

    Pivotal's products are already making waves among major industry players, who appreciate the unparalleled reliability and accuracy these solutions offer. While Pivotal cannot disclose customer names, the benefits of the GFC X and FRC are resonating strongly with the market.

    “Pivotal Systems has a long history of innovation in semiconductor manufacturing, consistently pushing the boundaries of what’s possible in flow control technology,” said Jan-Yu Weng, CEO of Pivotal Systems. “The launch of the GFC X and FRC at Semiconductor Taiwan is a testament to the company’s ongoing commitment to excellence.”

    Visit Pivotal Systems at Booth J3034 at SEMICON Taiwan 2024 to see the GFC X and FRC and learn more about how these groundbreaking products can enhance your semiconductor manufacturing processes.

    About Pivotal Systems

    Pivotal Systems provides the best-in-class gas flow monitoring and control technology platform for the global semiconductor industry, as well as other industries requiring high performance, high reliability gas flow solutions. The Company’s proprietary hardware and software utilizes advanced machine learning to enable preventative diagnostic capability resulting in significant increases in productivity and capital efficiency. For more information on Pivotal Systems Corp, visit www.pivotalsys.com.

    Press contact

    Michelle Adelson

    [email protected]

    1-310-500-7422

  • Strategic moves strengthen Pivotal’s global presence to meet rising demand for semiconductor solutions.

    Fremont, California – October 15, 2024 — Pivotal Systems Corporation, a leading provider of advanced gas flow control solutions across semiconductor and high-tech industries, announced the opening of its first manufacturing facility in South Korea. This new site represents a major step forward in the company’s global expansion.

    The grand opening ceremony for the new facility in South Korea is scheduled for October 15-17, celebrating Pivotal’s strengthened ties with key partners in the region.

    The new facility will support Pivotal’s mission to expand its presence in key Asian markets and strategically position the company closer to major semiconductor equipment manufacturers as part of their global manufacturing footprint.

    South Korea, with its growing scale in semiconductor manufacturing and emerging leadership in the industry, will be a key focus for Pivotal’s regional expansion.

    The location will manufacture Pivotal’s full suite of innovative gas flow control technologies, including new products launched earlier this year at SEMICON West and SEMICON Taiwan 2024.

    “With the semiconductor market rapidly evolving to support the growth of emerging AI-driven applications and touching everything we do every day, it is critical that we expand our manufacturing footprint to be closer to our customers and R&D facilities,” said Jan-Yu Weng, CEO of Pivotal Systems. “Our products solve our customers’ gas management needs and feature built-in intelligence that integrates data seamlessly into customer operations, enabling them to optimize production and drive smart data rich AI integration into their own factories more effectively.”

    The new facility positions Pivotal closer to its key industry partners, enabling faster delivery, dedicated support, and a higher level of responsiveness to meet growing customer demand.

    “This new site brings us closer to our customers, ensuring we can respond and scale more rapidly to their needs and deliver industry-leading solutions,” Weng added.

    The expansion follows Pivotal’s acquisition by OmegaX Inc. last year, which has driven significant growth and accelerated the company’s strategic initiatives. Since the acquisition, Pivotal has introduced several groundbreaking products, including the GFC-X and Flow Ratio Controller, which deliver unprecedented precision and efficiency in semiconductor manufacturing. The new facility will further strengthen Pivotal’s ability to lead in next-generation semiconductor technologies that support AI and other high-performance applications.

    Pivotal’s advanced gas flow control systems are designed to minimize environmental impact by reducing gas usage and improving overall efficiency. The new manufacturing facility will play a key role in supporting the company’s sustainability goals, lowering its global carbon footprint, and contributing to an eco-friendlier supply chain.

    About Pivotal Systems Corporation
    Pivotal Systems provides the best-in-class gas flow monitoring and control technology platform for the global semiconductor industry, as well as other industries requiring high performance, high reliability gas flow solutions. The Company’s proprietary hardware and software utilizes advanced machine learning to enable preventative diagnostic capability resulting in significant increases in productivity and capital efficiency. For more information on Pivotal Systems Corp, visit www.pivotalsys.com.

    Press Contact:
    Matthew Najera

    [email protected]

  •  

    (CEO Jan-Yu Weng, attending the ceremony for the relocation and expansion of Pivotal Systems' Korea office) 

     

    Pivotal Systems Corporation (hereafter Pivotal Systems) held a ceremony on the 15th to celebrate the expansion and relocation of its Korean branch, located in the Dongtan IT Valley. 

     

    Attendees at the ceremony included Jan-Yu Weng, CEO of Pivotal Systems, and representatives from Pivotal Systems Korea, who gathered to celebrate the expansion and relocation of the Korea office. CEO Jan-Yu Weng stated, 'Building on our high-quality Made in Korea products, we plan to establish an R&D center at Pivotal Systems Korea in the first quarter of next year. This center will focus on developing technologies and improving products tailored to the needs of our domestic customers, providing customized solutions." The new factory will feature advanced manufacturing facilities, bringing us closer to our key industry partners and ensuring high responsiveness to meet increasing customer demand through faster delivery and dedicated support. 

     

    The semiconductor market is rapidly evolving to support the growth of AI-based applications, impacting all aspects of daily life. It is crucial to expand our manufacturing base to position ourselves closer to customers and research and development facilities. 

     

    Headquartered in Fremont, California, Pivotal Systems provides precise gas flow monitoring and control technology platforms for the global semiconductor industry and other sectors requiring high-performance, high-reliability gas flow solutions. The decision to expand comes after significant growth since the establishment of the Korean branch in April. Pivotal Systems continues to maintain its competitiveness in the global semiconductor market through technological innovation and a customer-centric approach. 

     

    사람, 의류, 프레젠테이션, 인간의 얼굴이(가) 표시된 사진

자동 생성된 설명(Jan-Yu Weng, Pivotal Systems Corporation CEO) 

    Pivotal Systems' advanced process gas systems enable real-time flow control, monitoring, and correction based on Position-Based Control, which is grounded in the ideal gas law. By utilizing unique gas properties instead of conversion factors, these systems achieve the industry’s highest accuracy and fastest response times. This capability ensures quality and reliability in semiconductor manufacturing processes. Additionally, the systems are designed to minimize environmental impact by reducing gas consumption and improving overall energy efficiency, earning recognition as a sustainable technology. 

     

    Position-Based Control requires information on pressure, temperature, and valve position, conducting data gathering every 1 millisecond. Customers can receive this information as needed, enabling big data-driven trend management that was previously unattainable by competitors. 

     

    Through this expansion, Pivotal Systems plans to support its sustainability goals, contribute to global carbon neutrality, and build a more environmentally friendly supply chain. 

     

    CEO Jan-Yu Weng stated, "Through our Korean branch, we will produce high-quality 'Made in Korea' products and develop environmentally friendly sustainable solutions that meet customer needs and fulfill our social responsibilities. By providing solutions optimized for the domestic market, we aim to maximize customer satisfaction and enhance our competitiveness." 

     

     

    (Ribbon-Cutting Ceremony for the Expansion and Relocation of Pivotal Systems Korea) 


 Products

  • FLOW RATIO CONTROLLER (FRC)
    Pivotal System's latest product is the Flow Ratio Controller (FRC) that uses Pivotal’s proprietary control valve to improve wafer uniformity and wafer to wafer uniformity....

  • Pivotal System's Flow Ratio Controller is the fastes in the industry, exceeding a <1 sec. settling time requirement! ​ The FRC is available in 3 and 4 channel configurations with ECAT communication.  Come by our booth to learn more.
  • GAS FLOW CONTROLLER S SERIES (GFC-S)
    Pivotal Systems’ GFC-S series paves the way for the future of gas flow control!...

  • The GFC-S combines Pivotal's patented, high accuracy GFM™ system with its patented control valve technology making the GFC-S the fastest, most accurate, most reliable mass flow controller on the market.  The GFC-S is also calibration and maintenance free, increasing your fab productivity, gas savings, and reducing environmental impact!

    As process geometries within the semiconductor industry continue to shrink to 3nm and beyond, the need for highly accurate, responsive and repeatable gas flow control during wafer processing is essential. With the emergence of low gas flow rates, short processing times and continuous plasma processing, best-in-class MFCs are struggling to meet the accuracy, settling time and repeatability requirements demanded to ensure high yield and matched chambers.

    Pivotal Systems’ GFC-S paves the way for the future of gas flow control. The GFC combines Pivotal's patented, high accuracy GFM™ system with patented control valve technology. As such, it leapfrogs the current MFC technology by offering an order of magnitude improvement on key flow metrics, thereby enabling advanced wafer-manufacturing processes. 

    Feature Description:

    Wide Flow Range:Full Scale 0.5−100%

    Best Flow Accuracy: ±0.5% of Setpoint for 0.5−100% Full Scale

    Fastest Settling Time for Turn-On and Turndown:  ≦ 100ms:10% -100% Full Scale; ≦ 300ms:0.5% -10% Full Scale 

    Effect of Pressure and Temperature: Invariant

    Automated In Situ Calibration: NIST Traceable

    Innovative Control Technology:Robust Design, No Orifice

  • GAS FLOW CONTROLLER X SERIES (GFC-X)
    Pivotal Systems’ GFC-X paves the way for the future of gas flow control, enabling flows up to 50 SLM. The GFC-X is Pivotal's new high flow enabling GFC that combines a differential pressure sensor with Pivotal's patented control valve technology....

  • As process geometries within the semiconductor industry continue to shrink to 3 nm and beyond, the need for highly accurate, responsive and repeatable gas flow control during wafer processing is essential. With the emergence of low gas flow rates, short processing times and continuous plasma processing, best-in-class MFCs Introduction are struggling to meet the accuracy, settling time and repeatability requirements demanded to ensure high yield and matched chambers.

    Pivotal Systems’  GFC-X paves the way for the future of gas flow control. The GFC-X combines a differential pressure with patented control valve technology. As such, it leapfrogs the current MFC technology by offering an order of magnitude improvement on key flow metrics, thereby enabling advanced wafer-manufacturing processes. 

    Feature Description:

    Wide Flow Range:Full Scale 2.0−100%

    Flow Accuracy:±1.0% of Setpoint for 10% -100% Full Scale; ±0.25% of full scale for 2.0−10.0%  Full Scale 

    Fastest Settling Time for Turn-On and Turndown:  ≤300ms 10%-100% F.S. 

    Innovative Control Technology:Robust Design, No Orifice

  • GAS FLOW CONTROLLER T SERIES (GFC-T)
    The GFC-T is Pivotal Systems new thermal series...

  • The GFC-T is Pivotal Systems new thermal series

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