PM B.V.

Galileistraat 2
Dedemsvaart,  NL - 7701 SK

Netherlands
https://www.PM.nl
  • Booth: C2866

PM is a dutch manufacturer of high-precision linear bearings, slides, and customised positioning systems. We supply to major semiconductor equipment manufacturers for applications in lithography, bonding, testing, and metrology. At Semicon Europe, we display our new range of miniature slides and we have a live demo of a XY2Z-Theta motion system which is developed for wafer inspection offering high precision and high throughput. 


 Products

  • Wafer inspection stage for metrology
    The wafer inspection stage with XY2Z-Theta motion is designed for next-generation 200 and 300mm wafer inspection for use in metrology machines. The positioning stage offers nanometer-level precision and high throughput....

  • The design of the inspection stage is inspired by the results of in-house developed topology optimization software. Hence, the stage is well-balanced in terms of mass and stiffness. The integrated design has inherent advantages over conventionally stacked systems: dynamic performance is increased and Abbe errors are reduced.

    The first linear gantry axis is built on a granite structure, to provide a solid and accurate base. The second linear axis that moves perpendicularly to the first one is not stacked but integrated into the gantry axis. This makes sure that the stage adheres to the philosophy in which all bearings, centers of gravity, and motors are aligned in a single plane.

    Finally, the 2Z-Theta module for the inspection stage is placed inside the gantry, making the design incredibly compact and bringing all drive dynamics into one plane. Reducing the arm of the moving masses increase the observable stiffness and hence system performance benefits. 

    For more information visit the online product page https://www.pm.nl/en/products/motion-systems-positioning-systems/wafer-inspection-stage

  • Miniature linear slide MSR
    Introducing the cross roller miniature linear slide type MSR, a cutting-edge product that boasts a unique combination of cross-roller linear bearings and anti-cage creep technology (ACCI)....

  • Looking for an extremely compact precision slide table that can move quickly with high accuracy and low friction?  Look no further! The MSR slide is the smallest available in the industry with Anti-Cage Creep (ACC) and cross roller bearing technology.

    Why is this important?  For smooth motion, fast movement, and high system rigidity. High stiffness is important for quick acceleration and deceleration.It reduces system settling time.

    For detailed product information visit the product detail page https://www.pm.nl/en/products/linear-motion/cross-roller-slides/miniature-slide-type-msr-anti-cage-creep


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