Singulus Technologies AG

Hanauer Landstrasse 103
Kahl am Main,  D-63796

Germany
https://www.singulus.com/
  • Booth: C1232


SINGULUS offers vacuum deposition systems (Cluster Tools)

SINGULUS TECHNOLOGIES - Thin-Film Coating and Surface Treatment

SINGULUS TECHNOLOGIES develops and assembles innovative machines and systems for efficient thin-film coating and surface treatment processes, which are used worldwide in the Photovoltaics, Semiconductor, Medical Technology, Packaging, Glass & Automotive as well as Battery & Hydrogen markets.

The company’s core competencies include various processes of coating technology (PVD sputtering, PECVD, evaporation), surface treatment as well as wet-chemical and thermal production processes.

SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment for magnetic sensors (TMR, GMR, AMR), integrated inductors, MRAM, µLED, Advanced Packaging (RDL/UBM), Interconnects, and other semiconductor applications.The cluster tools from SINGULUS TECHNOLOGIES with the brand name TIMARIS offer a complete portfolio of process modules for a variety of applications.


 Products

  • TIMARIS Cluster Tool
    The TIMARIS cluster tool for PVD sputtering/PECVD of ultra-thin metallic and insulating films down to a thickness of one nanometer and below and stacks of such films with very precise material thickness and high uniformity specifications....

  • The TIMARIS PVD modules (FTM , iPVD, MTM, RSM and SDM) incorporate the full scope of sputtering techniques as: DC magnetron sputtering, pulsed DC magnetron sputtering and RF magnetron sputtering as well as combinations of these modes are selectable by recipe.

    All TIMARIS applications require the deposition of ultra-thin metallic and insulating films and film stacks down to a thickness of one nanometer and below with very precise material thickness and high uniformity specifications. The MTM and the FTM are the key components of the TIMARIS platform; the MTM incorporates the Linear Dynamic Deposition (LDD, US patent US 7,799,179 B2) technology in combination with ten sputter targets in one vacuum chamber.

    Applications
    • TMR, pTMR – MRAM
    • Magnetic sensor (GMR, AMR, TMR)
    • Integrated inductors
    • Integrated voltage regulator (Buck Converter)
    • MEMS
    • High moment materials
    • TFH reader & writer
    • Semiconductors
  • TIMARIS MRAM Platform
    Unique PVD Platforms for Critical Semiconductor Processes & Applications...

    • 10+4 targets for 8 & 12“ HVMDC / Pulsed
    • DC / RF sputtering
    • Magnetic and non-magnetic materials
    • Uniformity ~1 % 1σ
    • Sub Å control with unique LDD technology

    • Emerging memory, e.g. MRAM, RRAM, PCRAM, etc.
    • Sensors
    • Advanced optical applications
    • Special application
  • TIMARIS STM
    Unique PVD Platforms for Critical Semiconductor Processes & Applications...


  • TIMARIS STM Platform


        Max. 6 process modules
        Single target module
        Pre-clean module
        Heater module (batch & single)

    • High performance μ-LED
    • Low damage ITO
    • PZT
    • Interconnections

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