Bruker

Am Studio 2D
Berlin,  12489

Germany
http://www.bruker.com/Nano
  • Booth: C2224

Discover Semiconductor Excellence-Proven Metrology Solutions

Bruker delivers cutting-edge metrology solutions for the challenging demands of the semiconductor
industry. Advanced automation systems and rapid, non-contact analysis tools facilitate applied materials
research and process control in semiconductor manufacturing.


Discover a comprehensive spectrum of solutions ranging from x-ray technology, AFM, and Stylus Profiling
to Nano-Indentation, WLI, Ellipsometry, and nanoscale IR spectroscopy.
Applications include critical dimension metrology, the nanoscale characterization of electrical, mechanical,
and chemical properties, failure analysis and defect detection in wafer production, post-CMP and post-etch
processes, and C-S thin films and multi-layer thin film characterization.


Empowering semiconductor excellence with proven metrology solutions.


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