Nothing less than a semiconductor revolution!
ELEMENT 3-5 GmbH
ELEMENT 3—5 [Element three to five] - based in Baesweiler, Germany – is a technology source for the semiconductor industry. The product spectrum ranges from production systems based on the novel low-temperature epitaxy to powerful ion and plasma sources for wafer cleaning and surface activation.
Our innovative high-performance system - ACCELERATOR 3500K - enables production of monocrystalline aluminum nitride templates at 10-fold higher capacity, increased layer homogeneity and with significantly lower production costs compared to conventional MOCVD systems
Producers of Wide Bandgap power electronics or LED devices appreciate the significant productivity increases and capacity expansions offered by the ACCELERATOR 3500K.
The powerful ICP sources of ELEMENT 3-5 GmbH are mainly used in the field of wafer cleaning and surface activation. Their characteristics are high efficiency at high plasma densities paired with uniform distribution over large areas and volumes.
System solutions for material systems such as AlScN, GaN and SiC for large wafers will follow in 2024.
www.element3-5.com