EUMETRYS SAS

15 av. du Granier
Meylan,  France  38240

France
https://www.eumetrys.com
  • Booth: C2223

YOUR FAB'S PARTNER

Eumetrys invites you to discover equipments exclusively distributed in Europe to match your needs in a changing environment: Secure your Fab's production 

EQUIPMENTS:

Particle inspection (Laser Scanning) YGK system for unpatterned wafers.  SILICON wafers, SILICON CARBIDE, COMPOUND SURFACE INSPECTION. OPAQUE and TRANSPARENT SUBSTRATES. Substrates like Si; SiC; GaN, LT; LN; Sapphire; Glass from 3” to 8” in diameter or square automatically.

ETAMAX: 

ISTE: Ease control of your wafer handling and shipping carriers. Automated materials, Handling & cleaning systems for YOUR Fab will be introduced by ISTE experts.

ROBOTICS:

Overhaul, standard exchange, buy-out services. State-of-the-art repair services with Delexon, ISO9001. Critical robots handled: ATR8, ATR7, AQR7, ASYST21, MAG7, MTR5, DBM2407, PRI, BROOKS, RORZE, YASKAWA, SANKYO, ISEL

Robots, controllers, and prealigners for silicon, compound, and glass wafers.

SUPPLY:

Parts and consumables for different areas: CMP, PVD, CVD, ETCH, DEPOSITION, IMPLANT, WET, CLEAN, METROLOGY, LITHOGRAPHY, Hook-up.

Heating jackets, CMP consumables, and upgrades, Etch gaskets, SEZ chucks, O’rings, bearings, ESC chucks.

 

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